XacTorr® Series
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DATA SHEET Vaccuum Capacitance Manometers XacTorr ® Digital Capacitance Manometer Rugged, Stable Digital Capacitance Manometers for Process Vacuum Measurement Brooks XacTorr® CMX Series digital vacuum capacitance manometers (also referred to as capacitance diaphragm gauges) incorporate industry-leading features that improve measurement reliability, minimize drift, resist diaphragm contamination, and minimize thermal effects. The result is an exceptionally reliable capacitance manometer family for all vacuum measurement applications. An important benefit of the XacTorr® vacuum capacitance manometer is its advanced Mark-IV sensor. The sensor chamber contains surface areas that are not used in the pressure measurement; these surfaces provide locations for particles and condensable vapors to accumulate without affecting the sensor, dramatically reducing the need for re-zeroing and greatly extending sensor life. The sensor diaphragm is made from corrosion resistant Inconel®. Because they are fully digital devices, XacTorr® vacuum capacitance manometers operate over a wide dynamic range with extremely good accuracy. Flexible digital signal processor based electronics eliminates manual potentiometers and drift associated with the aging of old-style analog electronics. Digital precision: • Multi-decade digital calibration provides superior window of “known accuracy” • Real-time compensation for ambient temperature variations which improves measurement repeatability • lntelligent zero adjustment, local push-button, and remote zeroing for ease of maintenance capability that also improves long-term repeatability lntelli-Touch zeroing ensures that the XacTorr® Series cannot be zeroed if the pressure is too high or if the capacitance manometer has not reached a stabilized operating temperature - a common operator error with analog capacitance manometers. Highly efficient dual-zone temperature control: • Real-time temperature control of the sensor for improved measurement stability & repeatability • Fast warm-up with intuitive temperature status LED • Rapid response to changing system conditions View XacTorr® CMX Series Product Page

Features and Benefits In-situ Diagnostics & Independent Data Port • Provides a simple non-invasive method for maintenance and troubleshooting Digital Calibration • Automated calibration improves gauge to gauge reproducibility • Improved process reproducibility Dual Zone Temperature Control • Rapid compensation for changes in process temperature • Fast warm-up • Fast recovery from venting to high pressure Plasma Shield • Protects the entire surface area of the diaphragm from the build-up of process byproducts and particulates Digital Architecture • Virtually eliminates the drift associated...

Product Description Patented Mark IV Sensor The XacTorr® capacitance manometers utilize patented sensor technology. Unique corrosion resistant, shielded sensor design offers superior protection against condensable process byproducts. The sensor diaphragm is made from corrosion resistant Inconel®. This allows for extended operation of the capacitance manometers without degrading accuracy. Stress Relieving Ruby Roller Bearings Measurement Electrode Plasma Shield Guard Volume Mark IV Sensor Highly Efficient Dual Zone Temperature Control The XacTorr® capacitance manometers are offered with...

Product Specifications Independent Communications and Diagnostic Interface The XacTorr®’s RS-485 diagnostic port provides a unique, independent means of communicating with the gauge without having to “interupt” tool communications. This allows monitoring and data acquisition capabilities simultaneously with gauge operation, for chamber and tool matching along with “real time” advanced troubleshooting. PERFORMANCE Operating Temperatures: CMX0 CMX45 CMX100 Full Scale Ranges Accuracy1 Measurement Range Temperature Effect on Zero Temperature Effect on Span MECHANICAL Exposed Materials...

Product Dimensions - Analog Models

Product Dimensions

Model Code Code Description Code Option Option Description Base Model Code Model/Ordering Temperature Full Scale Range Electrical Connector 9 Pin Male Sub D 15 Pin Male Sub D DeviceNet with 9-Pin Female Sub D, Default Configuration, Real Data 15-Pin D Sub Connector with 2 Process Relays and a Temperature in Control Relay 15-Pin D Sub Connector with 1 Process Relay, 1 Temperature in Control Relay, and an Overheat Indicator Relay 0.5” OD Tube Stub (No Fitting) KF 10 Flange KF 16 Flange KF 25 Flange 8 VCR (1/2”) Female Mini CF 4 VCR (1/4”) Female RoHS Compliant Include Option Code “R” in the...