DATA SHEET Vapor Delivery VDM300 High-Accuracy, Deionized Water Vapor Delivery Module VDM300 Vapor Delivery Module The Brooks VDM300 vapor delivery module is a self-contained module for the highly accurate delivery of undiluted, ultra-high purity, deionized (DI) water vapor. The power efficient design allows for low temperature, ultra-high purity vapor generation without carrier gas. The VDM300 utilizes a proven vapor delivery technique and combines it with advanced digital control and integrated diagnostic features in a small, convenient package. Designed for advanced strip and post-metal etch passivation processes, the VDM300 delivers improved accuracy, wide control range and lower power consumption compared to flash evaporation systems. Based on proven thermal mass flow measurement techniques, the VDM300 produces vapor in a passivated titanium vessel in a non-super heated vapor stage, reducing the aggressive effects of deionized water, for improved reliability and cleaner operation. The VDM300 offers both analog (default) and EtherCAT (optional) communication interfaces. In addition, it provides user-friendly data logging and diagnostic features via an independent Micro USB service port and intuitive graphic user interface. Direct water vapor measurement with superior flow accuracy Based on proven, reliable thermal mass flow measurement and control technique Connects directly to the house Deionized Water supply Highly tolerant of varying water supply pressure Operates at lower temperatures (non-super heated state) Improved corrosion resistance Optimized design for flushing and draining Ensures cleaner operation View VDM300 Product Page

Product Description PERFORMANCE Full Scale Ranges (H2O) Turndown Ratio Step Response Time 3000 sccm 20:1 ≤ 2 seconds (±2% of setpoint) ±1.0% of setpoint (> 10% full scale); ±0.2% of full scale (5-10% full scale setpoint) Temperature Coefficient Valve Shutdown 0.05% F.S. per °C (zero and span) <0.5% F.S. (water vapor) ELECTRICAL Communication Input Signals Flow setpoint (0 to 5 Vdc) Start up/drain Output Signals Flow output (0 to 5 Vdc) Ready to use Power Diagnostic Port DC: ±15 Vdc ±5% @ 1.2 amp AC: 208 - 230 Vac, 50/60 Hz, 290 watts nominal Micro USB MECHANICAL Fittings See Model Code for list...

Product Dimensions

Model Code Code Description I. Code Option Option Description Vapor Delivery Module Base Model Code Flow Range Supply Voltage Fluid Inlet Fitting 1/4” VCR Male 1/4” Tube Compression Vapor Outlet Fitting Standard Backplate VIII. Pinout Options With Low Level Alarm Without Low Level Alarm Customer Special Request Sample Model Code