DATA SHEET Mass Flow Controllers & Meters SLAMf Series Thermal Mass Flow Elastomer Sealed, Digital, Gas Mass Flow Controllers & Meters for Hosedown/Washdown Hazardous Area Applications Model SLAMf Model SLA5850 with EtherNet/IP™ Whether it’s dust, moisture, temperature extremes or washdown requirements, the SLAMf Series thermal mass flow controllers and meters deliver the precise accuracy and long-term stability of our proven SLA5800 family of meters and controllers. A specially engineered IP66 enclosure protects our advanced digital electronics and ensures stable, accurate measurement and control of your process-critical gas and liquid mass flows. The SLAMf Series is well suited for chemical and petrochemical research, laboratory, analytical, fuel cell, biotechnology, and life science applications, among others. Highlights of the SLAMf Series mass flow products include: industry leading long term stability; accuracy backed by superior 17025 metrology systems and methods using primary calibration systems directly traceable to international standards, and a broad range of analog and digital I/O options to suit virtually any application. An independent diagnostic/service port permits users to set alarms and diagnostics, tune, troubleshoot or change flow conditions without removing the mass flow controller from service. The SLAMf Series provides a highly configurable platform based on a simple modular architecture. The feature set was carefully selected to enable drop-in replacement and upgrade of many brands of mass flow controllers. With the wide range of features and options available, the SLAMf Series provides users with a single platform to support a broad range of applications. IP66 rated hardened enclosure Ensures process accuracy and control in harsh conditions (equivalent to NEMA4X) Industry-leading long-term sensor stability Increased system uptime and reduced cost of ownership by reducing maintenance and eliminating periodic recipe adjustments and/or recalibrations User accessible service port Simplified installation, start-up, troubleshooting and access to diagnostics provides maximum uptime Ensures device is operating within user specified limits for high process yield uptime Superior valve technology Minimum leak-by, wide turndown, fast response and superior corrosion resistant materials reduces overall gas panel cost and increases throughput High accuracy traceable to international standards Calibration by verified metrology systems ensures precise process gas flow control Simple modular design Easy-to-service elastomer sealed design provides for factory or field service maximizing uptime and reducing total cost of ownership View SLAMf Product Page BrooksInstrument.com

Product Description Superior Thermal Flow Measurement Sensor Brooks’ sensor technology combines: • Excellent signal to noise performance for good accuracy at low setpoints • Superior long-term stability through enhanced sensor design, manufacturing and extensive burn-in process • Isothermal packaging to reduce sensitivity to external temperature changes • Corrosion resistant sensor flow path Advanced Diagnostics The mass flow controller remains the most complex and critical component in gas delivery systems. When dealing with highly toxic or corrosive gases, removing the mass flow controller...

Product Specifications SLAMf Series Standard Flow Ranges and Pressure Ratings: Mass Flow Controller Model Mass Flow Meter Model Flow Ranges N2 Eq. Ratings Min. F.S. Max. F.S. Maximum Operating Pressure psi/bar Standard ¹ Optional ¹ 1 for all 150 lb flanges 2 for all other connections 1-1/2” - 100 bar ⁵ 2” & 3” - 85 bar 4” & 6” - 70 bar 8” - 50 bar Flow rate dependant 1 Sanitary fittings - Model code 5A, 5B, 5C, 5D & 5E rated to 500 psi Maximum Pressure (see Table VI on page 12) ² 600 lpm of H2 possible with decreased accuracy. Greater than 40 psig inlet required for flows greater than 100 lpm...

Product Specifications Electrical Specifications Communication Protocol Electrical Connection Terminal Block Connections via 1/2" NPT (F) Conduit Optional: PG11 Cable Gland or M20 x 1.5 Conduit Power Max./Purge Power Requirements Watts, Max. Valve Orifice > 0.032”: 8 W Valve Orifice ≤ 0.032”: 5 W Without Valve: 2 W Embedded Browser Interface EtherNet/IPTM & PROFINET 1x 5-pin M8 Male Nano Change Connector / 2x 4-pin M12 Female D Coded Connector N/A From +13.5 Vdc to +27 Vdc Valve Orifice > 0.032”: 10 W Valve Orifice > 0.032”: 11 W Valve Orifice ≤ 0.032”: 7 W Without Valve: 4 W Valve Orifice ≤...

Product Description SLAMf Series Biotech Efficiency and simplicity combine to improve bioprocessing performance with the new SLAMf Series Biotech MFC. It incorporates several features created specifically to help streamline MFC purchasing, improve process gas control, enhance flexibility and satisfy regulatory requirements. To serve the unique requirements of your bioprocesses, Brooks Instrument has created two SLAMf Series Biotech options packages, built on the proven performance of the bioprocess-leading SLAMf Series MFC . As noted in the ordering instructions, all options are combined into...

Product Specifications SLAMf Series Biotech Performance Full Scale Flow Range Flow Accuracy (includes linearity and calibration system measurement uncertainty per SEMI E69)³ Repeatability & Reproducibility Turndown (control range) Response Time Valve Shut Down (leak-by) 1 Maximum flow depends on pressure conditions; consult Applications Engineering for details 2 Calibration on CO2 available as an option on SLA5850/60 & SLA5851/61 3 Accuracy at Calibration Conditions ; accuracy spec valid across the full control range SLAMf5850/60 Ratings Inlet Pressure Range Minimum Pressure Differential (Controllers)...

Product Dimensions SLAMf60031B Dimensional drawings for additional configurations are available in the corresponding Dimensional Drawing Quick Reference Guide or the Installation & Operation Manual Access our library of CAD Drawings