SLA7840
4Pages

DATA SHEET Pressure Controllers High-Purity, Metal Sealed, Digital, Remote Transducer Pressure/ Flow Controller SLA7840 Remote Transducer Pressure/Flow Controllers Model SLA7840 is a 1-1/8” wide profile high purity metal sealed instrument that controls pressure while measuring flow rate. The Model SLA7840 receives a remote pressure transducer signal, and using adjustable integral PID control electronics and a control valve, maintains a desired set pressure. In addition to the pressure function, the Model SLA7840 provides a 0-5 V signal that is linear with mass flow rate. The Model SLA7840 can also be configured as a mass flow controller for calibration or test purposes. Superior Valve Technology The co-planar valve offers unmatched performance. Due to its simplified construction, the valve exhibits superior repeatability, stability, and response time. Instruments are less sensitive to pressure variations in the process because of the larger valve control range. The co-planar valve also offers lower leak-by rates compared to other metal sealed controllers. These advancements ensure a more stable process over time. Highly Adaptable Configurations The 1-1/8” body offers a compact, space saving footprint. The SLA7840 is easily retrofitable to existing gas box designs that utilize the traditional 1-1/2” body platform. Likewise, the all-digital electronics is adaptable and allows the SLA7840 to serve as a direct replacement for existing analog products bringing with it greatly improved accuracy and reliability. Broad Array of Communication Options Brooks offers the Model SLA7840 with a traditional 0-5 volt analog option. Brooks also offers control interface with DeviceNetTM, a high-speed (up to 500k baud) digital communication network. Brooks’ communication capabilities and device-profiles have been certified by the ODVA (Open DeviceNet Vendor’s Association). Other network protocols are in development. Talk to your Brooks representative about your specific needs. Reduced Cost of Ownership The Model SLA7840 allows multi-gas and multi-range capabilities to reduce customer inventory. Storage and pre-programming of up to 10 gas calibrations easily permits users to switch between different gases and ranges on a single device. Also, the greater control range provided by the co-planar valve gives users the option to decrease the number of parts needed to control their entire process. View Model SLA7840 Product Page

Product Description Product Features • 1-1/8” Mechanical Platform • High Performance Co-Planar Valve • All wetted parts 32 Ra maximum to maintain particle, moisture and contamination free process conditions • All-Metal seals, High leak integrity (less than 1x10-10 atm-cc/sec He) • Flow accuracy ±1% of rate (or setpoint), including linearity to assure device is controlling precisely at desired level • Digital Communication options offer easy commissioning and reduced system wiring • Device can store 10 selectable calibrations and flow ranges • CE Compliant Analog I/O: • 15-pin • 0-5 Volt...

Product Specifications PERFORMANCE Flow Range** Any range from 0-3 sccm to 0-30,000 sccm N2 eq. Flow Control Range Flow Accuracy 33:1 ±1.0% of rate, including linearity (20% to 100%F.S.), ±0.2% of F.S. (below 20% full scale) Flow Repeatability Flow Temperature Sensitivity Flow Settling Time Pressure Ranges ±0.20% of rate Zero: Less than 0.035% F.S. per °C; Span: Less than 0.1% of rate per °C Actual flow: Less than 1 second to within ±2% full scale of final value for a 0-100% step per SEMI Guideline E17-91 Dependent upon remote transducer, maximum 500 psig. External Sensor Input Suitable for...

Service and Support Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with outstanding service and support to back it up. We operate first class repair facilities located around the world to provide rapid response and support. Each location utilizes primary standard calibration equipment to ensure accuracy and reliability for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the relevant International Standards. Visit www.BrooksInstrument.com to locate the service location...