DATA SHEET Mass Flow Controllers & Meters SLA5800 Series Elastomer Sealed, Digital, General Purpose Thermal Mass Flow Meters & Controllers for Gases Model SLA5850 with EtherNet/IP™ The SLA5800 Series thermal mass flow meters and mass flow controllers have gained broad acceptance as the standard for accuracy, stability and reliability. These products have a wide flow measurement range and are suitable for a broad range of temperature and pressure conditions making them well suited for chemical and petrochemical research, laboratory, analytical, fuel cell and life science applications, among others. Highlights of the SLA5800 Series include: industry leading long-term stability, accuracy backed by superior 17025 metrology systems and methods using calibration systems directly traceable to international standards, and a broad range of analog and digital I/O options to suit virtually any application. An independent diagnostic/ service port permits users to set alarms and diagnostics, tune, troubleshoot or change flow conditions without removing the mass flow controller from service. The SLA5800 Series provides a highly configurable platform based on a simple modular architecture. The feature set was carefully selected to enable drop-in replacement and upgrade of many brands of mass flow controllers. With the wide range of features and options available, the SLA5800 Series provides users with a single platform to support a broad range of applications. Features Industry leading long-term sensor stability Increased system uptime and reduced cost of ownership by reducing maintenance and eliminating periodic recipe adjustments and/or recalibrations User accessible service port Simplified installation, start-up, troubleshooting and access to diagnostics provides maximum uptime Ensures device is operating within user specified limits for high process yield and uptime Superior valve technology Minimum leak-by, wide turndown, fast response and superior corrosion resistant materials reduces overall gas panel cost and increases throughput Calibration by verified metrology systems ensures precise process gas flow control High accuracy traceable to international standards Simple modular design Easy-to-service elastomer sealed design provides for factory or field service maximizing uptime and reducing total cost of ownership Adaptable mechanical configurations Easily retrofit to existing systems View SLA5800 Product Page

Product Description Superior Thermal Flow Measurement Sensor Brooks’ sensor technology combines: • Excellent signal to noise performance for good accuracy at low setpoints • Superior long-term stability through enhanced sensor design manufacturing and extensive burn-in process • Isothermal packaging to reduce sensitivity to external temperature changes Advanced Diagnostics The mass flow controller remains the most complex and critical component in gas delivery systems. When dealing with highly toxic or corrosive gases, removing the mass flow controller to determine if it is faulty should be the...

Product Specifications SLA5800 Series Standard Flow Ranges and Pressure Ratings: Mass Flow Controller Model Mass Flow Meter Model Maximum Operating Pressure Flow Ranges N2 Eq. Ratings Max. F.S. Min. F.S. ¹ Sanitary fittings - Model code 5A, 5B, 5C, 5D & 5E rated to 500 psi Maximum Pressure ² 600 lpm of H2 possible with decreased accuracy; > 40 psig inlet required for flows greater than 100 lpm N₂ equivalent. ³ 4500 psi/310 bar available as a special on SLA5861 only SLA5850/60 Full Scale Flow Range (N2, Eq.) Flow Accuracy – 17025 Certified Devices (includes linearity, excludes calibration system...

Product Specifications Electrical Specifications Communication Protocol Profibus® DeviceNetTM Electrical Connection 1 x 15-pin Male Sub-D, 1 x 15-pin Male Sub-D/ 1 x M12 with (A) 1 x 9-pin Female threaded coupling nut Sub-D (B) Power Max./Purge From +13.5 Vdc to +27 Vdc Power Requirements Watts, Max. V alve Orifice ≤ 0.032”: 5 W Without Valve: 2 W EtherCAT® 1 x 5-pin M8 with threaded coupling nut 2 x RJ45 0-5V From +13.5 Vdc to +27 Vdc Valve Orifice > 0.032”: 10 W Valve Orifice > 0.032”: 8.5 W Valve Orifice ≤ 0.032”: 7 W Valve Orifice ≤ 0.032”: 5.5 W Without Valve: 4 W Without Valve: 2.5 W Web-based...

Product Description SLA5800 Series Biotech Efficiency and simplicity combine to improve bioprocessing performance with the new SLA5800 Series Biotech MFC. It incorporates several features created specifically to help streamline MFC purchasing, improve process gas control, enhance flexibility and satisfy regulatory requirements. To serve the unique requirements of your bioprocesses, Brooks Instrument has created two SLA5800 Series Biotech options packages, built on the proven performance of the bioprocess-leading SLA5800 Series MFC . As noted in the ordering instructions, all options are combined...

Product Specifications SLA5800 Series Biotech Performance Full Scale Flow Range² Flow Accuracy (includes linearity and calibration system measurement uncertainty per SEMI E69) ₃ Repeatability & Reproducibility Turndown (control range) Response Time Zero Stability Temperature Coefficient Valve Shut Down (leak-by) 1 Maximum flow depends on pressure conditions; consult Applications Engineering for details 2 Calibration on CO2 available as an option on SLA5850/60 & SLA5851/61 3 Accuracy at Calibration Conditions ; Accuracy spec valid across the full control range SLA5850/60 Ratings Inlet Pressure...

Product Dimensions FITTINGS - DIMENSION "B" FITTING MOUNTING HOLES *OVERALL LENGTH FINGER TIGHT **DEVICES WITH 5848 INLET FILTER WILL BE 2" OR 1.42" LONGER ELECTRO/MECHANICAL DIMENSIONS Model ProfiNet/ Foundation EtherNet Fieldbus mm / inch mm / inch mm / inch mm / inch mm / inch mm / inch mm / inch mm / inch mm / inch mm / inch mm / inch mm / inch 5850

Product Dimensions *OVERALL LENGTH FINGER TIGHT ELECTRO/MECHANICAL DIMENSIONS Model 5853 5863 Analog Profibus RS485 mm / inch mm / inch mm / inch 199.0/7.8 174.3/6.86 174.3/6.86 155.0/6.1 174.3/6.86 174.3/6.86 ProfiNet/ EtherNet mm / inch mm / inch mm / inch 171.0/6.73 184.9/7.28 184.9/7.28 171.0/6.73 184.9/7.28 184.9/7.28 Access our library of CAD Drawings 8 D E F Foundation Fieldbus mm / inch mm / inch mm / inch mm / inch 184.9/7.28 84.0/3.31 137.0/5.4 149.2/5.87 184.9/7.28 84.0/3.31 N/A 149.2/5.87