DATA SHEET Pressure Controllers & Flow Meters Metal Sealed, Digital, Ultra-High Purity Thermal Pressure Controllers & Flow Meter for Gases Designed for semiconductor and MOCVD applications, PC100 Series pressure control and flow measurement devices deliver outstanding performance, reliability, and system simplicity. Built on the proven, advanced technology of the GF100 Series mass flow controllers, process throughput and yield are maximized while process costs are reduced. High-purity All-metal Flow Path The Brooks PC100 Series has an all metal, corrosion resistant Semi F20 compliant wetted flow path with highly corrosion resistant Hastelloy® C-22 valve seat and jet orifice. • Overall reduced surface area and un-swept volumes allow for faster dry-down during purge steps • Long-term thermal or pressure sensor and device stability maximizes yield and throughput Advanced Thermal Flow Measurement Sensor The PC125 with embedded flow meter includes a proprietary highly corrosion resistant Hastelloy C-22 sensor. The enhanced sensor manufacturing and burn in process incorporate a unique orthogonal sensor mounting orientation to eliminate sensor drift caused by valve heating effects and eliminate thermal siphoning effects. This unique sensor configuration includes an optimized temperature profile for gases prone to thermal decomposition. This design results in: • Enhanced signal to noise performance for improved accuracy at low set points • Superior reproducibility at elevated temperatures through new isothermal packaging and onboard conditioning electronics with ambient temperature sensing and compensation • Improved long-term stability Enhanced Diagnostics and User Interface The Brooks PC100 Series provides for in-line device evaluation and instantaneous troubleshooting resulting in limited service interruption and reduced downtime. • Independent diagnostic/service port • High visibility LCD display with easy accessible push button for local indication of Flow (%), Temperature (°C), Torr/Pressure (PSIA/ kPa) and Network Address • Zero button easily re-zeros the device during scheduled maintenance. Zero button will zero pressure transducer or the thermal sensor, depending on what is visible on the display. Communication Interfaces The PC100 Series supports DeviceNet™ communication protocol. DeviceNet is a multi-drop connection that allows a maximum of 64 devices to be connected on the same network. Brooks Instrument’s DeviceNet profile has been certified by the ODVA™ (Open DeviceNet Vendor’s Association). PC100 Series digital pressure control with patented flow sensor combined with a high speed ARM processor and fast acting diaphragmfree valve assembly enables: • Faster response and settling time for improved pressure control • Reduced diverted gas consumption and associated abatement costs • User programmable start-up function for processes requiring a slow ramped pressure control View PC100 Product

Product Specifications Performance Embedded Thermal Flow Sensor Pressure Control Mode Full Scale Range Pressure Reading Reference Accuracy PC115 No Downstream and Upstream Min Flow Range: 0-20 sccm H2; 0-20 sccm N2 Max Flow Range: 0-5 slm H2; 0-5 slm N2 Downstream: 34 to 100 psia 34 to 100 psia Upstream: 0 Torr to 350 Torr ±1% of reading Zero Temp. Coefficient Span Temp. Coefficient Pressure Control Range Downstream: >20 Torr to 100% F.S. >20 Torr to 100% F.S. Upstream*: >150 Torr to 100% F.S. *Upstream controller turndown is directly tied to reference pressure. Control range is assuming hard...

Model Code Code Description I. Base Model Code Pressure Controller, N2 & H2 at flow rates 0 to 5 slpm Code Option Option Description Pressure Controller with Flow Meter, N2 & H2 at 10 SLPM only Specific Gas and Range Required Upstream (For PC115 only) Downstream (For PC125 and PC115) Full Scale Pressure Pressure Measurement Full Scale Pressure Torr Reference Pressure - Downstream (psia) (default) Reference Pressure - Upstream (psia) (default) VIII. Gas and Flow Rate Options H2 at 10 slpm (PC125) Specific Gas (H2 & N2 only), and flow rate 0 to 5 slpm for PC115 1 1/8” body width, 1/4” VCR male...

Product Dimensions PC100 Series - VCR® Configuration