DATA SHEET Mass Flow Controllers Metal Sealed, Digital, MultiFlo™️ Thermal Mass Flow Meters & Controllers for Gases Brooks® GF80 thermal mass flow controllers (MFCs) and thermal mass flow meters (MFMs) achieve unprecedented performance, reliability, and flexibility in many gas flow measurement and control applications. At the heart of the GF80 is Brooks’ patented 4th generation MultiFloTM capable device. MultiFlo overcomes a long-standing limitation of many thermal MFCs – when changing gas types, a simple correction factor, such as the ratio of heat capacities between the calibration gas and new gas, cannot account for accuracy-robbing viscosity and density differences. The Brooks MultiFlo database is built on thousands of native gas runs to establish correction functions that account for both thermal and physical differences among gases making the GF80 Series among the most accurate and flexible MFCs/MFMs available today. The Brooks GF80 Series is the perfect choice for customers who use thermal mass flow controllers or thermal mass flow meters on a variety of gases, who need to change gas type frequently, or who need to re-range while preserving gas measurement and control accuracy. Some examples: • OEMs will reduce the number of gas and range-specific MFCs that they inventory • Solar, biotech, CVD, plasma, glass, web coating, nanotechnology, vacuum processing and similar large users of mass flow meters and mass flow controllers will greatly reduce their gas- and range-specific spares inventory • R&D, research, and laboratory users can quickly change experiment conditions and achieve much better actual process gas accuracy vs. traditional mass flow devices With a range of digital and analog I/O options available, GF80 represents an extremely powerful, yet easy, upgrade for existing MFCs or MFMs. View GF80 Product Page

Diagnostic / Service Port • Easy diagnostics and troubleshooting • Independent of tool communication Analog and Digital Communication Options: • RS485 Analog • DeviceNetTM • Profibus® Solenoid Control Valve • Elastomer or Metal Seals • High purge rate capability • Normally open or normally closed operation Third Generation Fast Response Sensor • Excellent long-term stability (<+0.5% F.S/yr.) • Improved signal to noise ratio • High purge rate capability • Lower temperature operation for gases prone to thermal decomposition Temperature Sensor • Accurate flow and temperature measurement over full...

Features and Benefits MultiFlo™ Gas and Range Configurability A major advancement over traditional single point gas conversion factors, Brooks MultiFlo technology delivers up to a three-times improvement in process gas accuracy. This is achieved through advanced gas modeling plus extensive actual gas testing protocols that provide extremely accurate compensation. MultiFlo also allows the device to be quickly and easily configured for another gas and/or flow range without sacrificing accuracy or range-ability. Selecting a new gas automatically creates a new calibration curve, establishes optimized...

Product Description Advanced Thermal Flow Measurement Sensor Brooks’ proprietary sensor technology combines: • Improved signal to noise performance for improved accuracy at low setpoints • Improved reproducibility at elevated temperatures through new isothermal packaging, onboard conditioning electronics with ambient temperature sensing and compensation • Improved long-term stability through an enhanced sensor manufacturing process • Highly corrosion resistant Hastelloy C-22 sensor tube • Optimized temperature profile for gases prone to thermal decomposition Enhanced Diagnostics The mass flow...

Product Applications Solar Cell / CVD Developed to meet the diverse process requirements for solar cells, fiber optics, and the glass and metal coatings markets, the GF80 mass flow controllers offer a single platform solution for diffusion furnaces, thin film deposition, and other difficult applications. With the GF80 offering metal seals, this single platform can cover complex gas distribution systems. The MultiFlo feature can minimze costly inventory while providing industry leading actual gas accuracy. Table Top Bioreactors Brooks has earned the leading reputation in controlling gas flows...

PERFORMANCE Full Scale Flow Range (N2 Eq.) Flow Accuracy Repeatability & Reproducibility Response Time (Settling Time) Normally Closed Valve < 1 sec. (within 2% for steps 0-10 through 0-100%) Control Range Valve Shut Down Zero Stability Pressure Coefficient Attitude Sensitivity <0.25% span change @ 90O after rezeroing (N2 @ 50 psi) Auto Zero: Optional: (When Auto Zero is enabled the device performs the zero function once every time the set point returns to zero. To accomplish, simply provide a zero set point.) Auto shut-off: The Auto Shut-off feature closes the GF80 valve when the set point drops...

Product Specifications Communication Protocol Electrical Connection 1 x 15-pin Male Sub-D/ 1 x 9-pin Female Sub-D Analog I/O GF80 Power Max./Purge 1 x M12 with threaded coupling nut (B) VOLTAGE SETPOINT SPECIFICATIONS Nominal Range Full Range Input Impedence Required Max. Sink Current CURRENT SETPOINT Nominal Range Full Range Input Impedence FLOW OUTPUT (VOLTAGE) SPECIFICATIONS Nominal Range Full Range FLOW OUTPUT (CURRENT) SPECIFICATIONS Nominal Range Full Range Max. Load 0-20 mA or 4-20 mA 0-22 mA (@ 0-20 mA); 3.8-22 mA (@ 4-20 mA) 400 Ohms (for supply voltage: 12-24 Vdc ANALOG I/O ALARM OUTPUT³...

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Model Code Code Description Code Option Option Description1 Base Model Code Special Application Valve Configuration Normally Closed Valve Meter (No Valve) Metal / Range Flow (0-55 slpm) MultiFlo Capable. Standard Bins or specific gas range may be selected Not MultiFlo Capable. Specific gas/range required Specific Gas Code & Range, i.e. “0004” = Argon and “010L” = 10 slpm Standard Configuration #40, 3-10 sccm Nitrogen Equivalent (0° C Reference) Standard Configuration #41, 11-30 sccm Nitrogen Equivalent (0° C Reference) Standard Configuration #42, 31-92 sccm Nitrogen Equivalent (0° C Reference)...