GF40 Series
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DATA SHEET Mass Flow Controllers & Meters Elastomer Sealed, Digital, ™ MultiFlo Thermal Mass Flow Meters & Controllers for Gases Brooks® GF40 (elastomer seal) thermal mass flow controller (MFC) and thermal mass flow meter (MFM) achieves unprecedented performance, reliability, and flexibility in many gas flow measurement and control applications. Model GF40 At the heart of the GF40 is Brooks’ patented 4th generation MultiFloTM capable device. MultiFlo overcomes a long-standing limitation of many thermal MFCs – when changing gas types, a simple correction factor, such as the ratio of heat capacities between the calibration gas and new gas, cannot account for accuracy-robbing viscosity and density differences. The Brooks MultiFlo database is built on thousands of native gas runs to establish correction functions that account for both thermal and physical differences among gases making the GF40 Series among the most accurate and flexible MFCs/MFMs available today. The Brooks GF40 Series is the perfect choice for customers who use thermal mass flow controllers or thermal mass flow meters on a variety of gases, who need to change gas type frequently, or who need to re-range while preserving gas measurement and control accuracy. Some examples: • OEMs will reduce the number of gas and range-specific MFCs that they inventory • Solar, biotech, CVD, plasma, glass, web coating, nanotechnology, vacuum processing and similar large users of mass flow meters and mass flow controllers will greatly reduce their gas- and range-specific spares inventory • R&D, research, and laboratory users can quickly change experiment conditions and achieve much better actual process gas accuracy vs. traditional mass flow devices MultiFlo programming is simple and fast – a new gas and range can be programmed under 60 seconds plus the device can be programmed without removing it from service or disconnecting the device from any process or tool control system. The Brooks GF40 Series features a corrosion-resistant Hastelloy C-22 sensor for durable, long-term operation. Sub-1 second settling times and 1% of set point accuracy ensure that the GF40 will provide reliable flow measurement or flow control in demanding gas flow applications. The GF40 achieves excellent internal to external leak integrity for challenging process gases as found in CVD, solar, and other processes. With a wide range of connector types, seal and seat materials, and digital and analog I/O options available, the GF40 represents an extremely powerful, yet easy, upgrade for existing MFCs or MFMs.

Analog and Digital Communication Options: • RS485 Analog • DeviceNetTM • Profibus® • EtherCAT® Diagnostic / Service Port • Easy diagnostics and troubleshooting • Independent of tool communication Third Generation Fast Response Sensor • Excellent long-term stability (<+0.5% F.S/yr.) • Improved signal to noise ratio • High purge rate capability • Lower temperature operation for gases prone to thermal decomposition Solenoid Control Valve • Elastomer or Metal Seals • High purge rate capability • Normally open or normally closed operation Temperature Sensor • Accurate flow and temperature...

Product Description MultiFlo™ Gas and Range Configurability A major advancement over traditional single point gas conversion factors, Brooks MultiFlo technology delivers up to a three-times improvement in process gas accuracy. This is achieved through advanced gas modeling plus extensive actual gas testing protocols that provide extremely accurate compensation. MultiFlo also allows the device to be quickly and easily configured for another gas and/ or flow range without sacrificing accuracy or range-ability. Selecting a new gas automatically creates a new calibration curve, establishes...

Product Description Enhanced Diagnostics The mass flow controller remains one of the most complex and critical component in gas delivery systems; removing the mass flow controller to determine if it is faulty should be the last resort. In response to this fact, Brooks pioneered smarter mass flow controllers with embedded self test routines and introduced an independent diagnostic/service port to provide access to diagnostic data for troubleshooting without interrupting flow controller operation. Advanced Thermal Flow Measurement Sensor Brooks’ proprietary sensor technology combines: •...

Product Applications Solar Cells / CVD Developed to meet the diverse process requirements for solar cells, fiber optics, and the glass and metal coatings markets, the GF40 mass flow controllers offer a single platform solution for diffusion furnace, thin film deposition, and other difficult applications. With the GF40 offering a variety of elastomer seals this single platform can cover complex gas distribution systems. The MutliFlo feature can minimize costly inventory while providing industry leading actual gas accuracy. Table Top Bioreactors Brooks has earned the leading reputation in...

Product Specifications Performance Full Scale Flow Range (N2 Eq.) Flow Accuracy Repeatability & Reproducibility Linearity Response Time (Settling Time) GF40 3 sccm to 50 slm +1% S.P. 35-100%, +0.35% F.S. 2-35% < + 0.2% S.P. + 0.5% F.S. (included in accuracy) Normally Closed Valve < 1 sec. (within 2% for steps 0-10 through 0-100%) Normally Open Valve < 3 sec (within 2% for steps 0-10 through 0-100%) Control Range Valve Shut Down Zero Stability Pressure Coefficient Attitude Sensitivity <0.25% span change @ 90O after rezeroing (N2 @ 50 psi) Auto Zero: Auto shut-off: Optional: (When Auto Zero...

Product Specifications Communication Protocol Communication Protocol Electrical Connection Analog I/O GF40 Power Max./Purge Profibus® 1 x 15-pin Male Sub-D/ 1 x 9-pin Female Sub-D DeviceNetTM 1 x M12 with threaded coupling nut (B) EtherCAT® 5-pin M8 with threaded coupling nut/ 2 x RJ45 Voltage Set Point Input Specification Nominal Range Full Range Absolute Max. Input Impedence Required Max. Sink Current Current Set Point Nominal Range Full Range Absolute Max. Input Impedence 25 mA (without damage) 250 Ohms Flow Output (Voltage) Specifications Nominal Range Full Range Min Load Resistance...