GF100 Series EtherCAT®
9Pages

DATA SHEET Thermal Mass Flow GF100 Series with EtherCAT® The Fastest and Most Accurate MFCs Enhanced with the Speed of EtherCAT® GF100 Series with EtherCAT® High Purity/Ultra-High Purity Thermal Mass Flow Controllers and Meters Through hundreds of thousands of installations, the GF100 Series has been proven to have the fastest response time and most accurate performance of any mass flow controller on the market today, enabling precision gas chemistry control. Now enhanced with the speed of EtherCAT® (an Ethernet based communication system known for its cost efficient cabling and application efficiency), the GF100 Series delivers improved key specifications for the increasing demands of semiconductor processes. Features & Benefits • All-metal seal flow path: option for 5µ or 10µ inch Ra surface finish • Real-time EtherCAT® data acquisition capabilities • Improved valve shutdown (≤ 0.15% of bin range) reduces valve leak-by to reduce first wafer effects • Ultra-stable flow sensor (≤ 0.15% of F.S. drift per year) enables tighter low set point accuracy and reduces maintenance equirements ensuring long term zero stability • Newly enhanced pressure transient insensitivity reduces crosstalk sensitivity for consistent mass flow delivery • Ultra-fast settling times: as low as 300 ms • MultiFloTM technology enables one MFC to support thousands of gas types and range combinations without removing it from the gas line or compromising on accuracy • GF120 Safe Delivery System (SDS®) low pressure drop MFC for the delivery of sub atmospheric safe delivery system (SDS) gases used in Implant and Etch processes View GF100 Series w/ EtherCAT Product Page

Product Specifications Performance Full Scale Flow Range Flow Accuracy Repeatability & Reproducibility Flow Settling Time (NC Valve) < 1 sec Flow Settling Time (NO Valve) Pressure Insensitivity Control Range < 1% S.P. up to 5 psi/sec upstream press. spike 2-100% (Normally Closed Valve) 3-100% (Normally Open Valve) 2-100% (Normally Closed Valve) Valve Shut Down (N.C. Valve) ¹ 0.15% of F.S. Zero Leak Valve: SH40 -SH41 < 0.02% F.S. SH42-SH50 <0.005% F.S. Valve Shut Down (N.O. Valve) <1% of F.S. Zero Leak Valve: SH40-SH41 < 0.02% F.S. SH42-SH50 <0.005% F.S. Zero Stability Temperature...

Product Specifications Electrical Electrical Connection Power via 5-pin M8 Connector, EtherCAT via RJ45 jacks Digital Communication Diagnostic /Service Port Power Supply/Consumption 320 mA max. @ 18-30 Vdc, 230 mA max. @ 24 Vdc (under typical operating conditions) Compliance EMC Environmental Compliance MC Directive 2014/30/EU Evaluation Standard EN61326-1:2013 E RoHS Directive (2011/65/EU) REACH Directive EC (1907/2006)

Product Specifications Performance GF101 Full Scale Flow Range Flow Accuracy Repeatability & Reproducibility Response Time/Settling Time (NC Valve) Pressure Insensitivity Control Range Ability to measure inlet presssure 5-100% (Normally Closed Valve) Valve Shut Down (N.C. Valve) Zero Stability Temperature Coefficient Ratings Operating Temperature Range Differential Pressure Range Maximum Operating Pressure Proof Pressure Design Pressure Burst Pressure Controller: 75 psig Meter: 150 psig 700 psia 800 psia 3000 psia Leak Integrity (external) 700 psia 800 psia 3000 psia 140 psia 170 psia 500...

Product Dimensions - Surface Mount Configurations C-Seal C-Seal

Product Dimensions - VCR Configurations Access our library of CAD Drawings

Model Code (GF100/120/125 EtherCAT) Code Description I. Base Model Code II. Package / Finish Specifications Code Option Option Description High Purity/Ultra High Purity Digital Mass Flow Controllers Flow range 3 sccm - 55 slpm N2 Equivalent.; 1 sec Response; 10 Ra Flow range 3 sccm - 55 slpm N2 Equivalent.; 700 msec Response; 5 Ra Pressure Transient Insensitive (PTI) Flow range 3 sccm -55 slpm N2 Equivalent; 300-700 msec Response; 5 Ra MultiFlo capable. Standard bins or specific gas/range may be selected. Not MultiFlo capable. Specific gas/range required. (must select w/ SD or SL special...

Model Code (GF101/121/126 EtherCAT) Code Description I. Base Model Code II. Package / Finish Specifications Option Description High Purity/Ultra High Purity Digital Mass Flow Controllers Flow range 55 - 300 slm N2 Equivalent.; 10 Ra HP wetted flow path Flow range 55 - 300 slm N2 Equivalent 5 Ra HP wetted flow path Flow range 55 - 300 slm N2 Equivalent 5 Ra HP wetted flow path & integrated pressure measurement MultiFlo capable. Standard bins or specific gas/range may be selected Not MultiFlo capable. Specific gas/range required Special Application Normally Closed valve Meter (No Valve)...

Service and Support Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with outstanding service and support to back it up. We operate first class repair facilities located around the world to provide rapid response and support. Each location utilizes primary standard calibration equipment to ensure accuracy and reliability for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the relevant International Standards. Visit www.BrooksInstrument.com to locate the service location...