DATA SHEET Vacuum Measurement Compact, Unheated, Capacitance Manometers Used as the vacuum capacitance manometer of choice for thin-film processes, the Brooks® CMC Series capacitance manometers provide accurate total pressure measurement independent of gas composition. The CMC Series delivers exceptional performance over a wide range of operating temperatures, making it an alternative choice to larger premium performance unheated gauges. The CMC is 40% smaller in size than traditional unheated capacitance manometers. Ideal for Aggressive Applications The all-welded design and Inconel® wetted surfaces ensures reliable operation in even the most aggressive processes. The combination of precision components and a wide temperature compensated operating range allows the CMC to deliver best-in-class zero and span temperature coefficients for optimum measurement stability. Available for Typical Process Ranges The CMC Series is available in full scale ranges from 1000 Torr to 10 Torr and is an ideal upgrade for small form-factor capacitance manometers and an economical alternative to full-sized unheated capacitance manometers. 40% smaller than traditional unheated capacitance manometers The CMC Series delivers similar performance in a space saving, economic package. Robust all-welded construction Ensures optimum measurement repeatability compared to other designs that are prone to error inducing internal stresses that cause unpredictable variations in pressure measurement independent of gas composition. Optional high-accuracy calibration Delivers the accuracy of more costly premium unheated manometers. View CMC Series Product Page

Product Specifications PERFORMANCE Full Scale Ranges Accuracy 10, 20 50, 100, 200 and 1000 Torr Type A = 0.25% of reading; Type B = 0.5% of reading Infinite, limited by output noise (≤0.0006% F.S.) Temp. Effect on Zero Temp. Effect on Span Response Time Operating Temperature Compensated Temperature Exposed Materials2 Inconel® Over-Pressure Limit Weight ELECTRICAL Input Power Output Signal Power Consumption Electrical Connectors 5-pin terminal strip 9-pin D sub 15-pin D sub on 6” cable CERTIFICATIONS Electromagnetic Compatibility RoHs Fully CE certified to EMC Directive 89/336/EEC Compliant Notes:...

Model Code Code Description I. Base Model Number Compact Capacitance Manometer 10 Torr 20 Torr 50 Torr 100 Torr 200 Torr 1000 Torr 10 mbar* 20 mbar 100 mbar 1000 mbar 1.333 kPa 13.33 kPa 133.3 kPa Full Scale Range Electrical Connector 9-pin sub D, 0-10 Vdc 5-pin terminal strip, 0-10 Vdc 15-pin sub D, 0-10 Vdc on 6” cable 1/2” tube stub KF10 KF16   KF25 8VCR® F 1/4” tube stub 4VCR® F ± 0.25% of reading accuracy ± 0.5% of reading accuracy RoHs Compliant * Available with “B” Code (.5% of reading) only. Sample Standard Model Code I II III IV V VI CMCA T11 1 Q

Service and Support Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with outstanding service and support to back it up. We operate first class repair facilities located around the world to provide rapid response and support. Each location utilizes primary standard calibration equipment to ensure accuracy and reliability for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the relevant International Standards. Visit www.BrooksInstrument.com to locate the service location nearest...