DATA SHEET Mass Flow Controllers & Meters Metal Sealed, Digital, High Temperature Mass Flow Controllers & Meters for Gases & Liquids 9861 Series Mass Flow Controller/Meters Originally developed by Unit Instruments (later Celerity Inc.), the 9861 Series of high temperature mass flow controllers and meters continue to be manufactured using the same supply chain and copy exact process by Brooks Instrument who acquired the IP and assets of Celerity Inc. in 2009. The 9861 Series remains the optimum choice for critical precursor and dopant vapor delivery in semiconductor and optical fiber manufacturing. The 9861 Series are thermal mass flow controllers and meters designed for challenging high temperature delivery of condensable precursors and dopants. A high purity, high leak integrity metal flow path ensures compatibility with all process gases and vapors. The patented IsoSensor™ is a high stability flow sensor compatible with the elevated environmental temperatures found in heated gas lines and baking systems (temperature-controlled gas boxes). The ultra-low drift performance of the IsoSensor reduces the need for frequent re-zeroing and recalibration typical in high temperature applications. For maximum flexibility and inventory reduction, the 9861 Series remote electronics come standard with two analog electrical connectors (a 20 pin card edge and a 9 or a 15 pin “D” connector option) and Semi industry standard RS485 digital communication enabling easy retrofit and standardization. In mass flow controller models, a diaphragm free solenoid control valve provides a wide dynamic control range for superior precision and control. Designed for long-term reliability, the valve has been marathon tested to over 8 million cycles with no degradation in performance. View 9861 Series Product Page

Features and Benefits Features High temperature mass flow controller Reliable delivery of condensable gases and precursors Digital measurement and control architecture Enhanced accuracy and process control Ultra-High purity flow path Ensures integrity and purity of gas/vapor Ultra-stable flow measurement sensor Reduced maintenance for superior uptime and lowest cost of ownership Upstream pressure buffering (optional) Stable mass flow delivery under challenging supply conditions All metal diaphragm free control valve Enhanced long-term reliability Universal upgrade enabling standardization and...

Product Specifications PERFORMANCE Settling Time (to within 2% of setpoint) Fast Start Soft Start Accuracy (N2 equivalent) 35% to 100% F.S. < 35% F.S. Repeatability (full scale) Linearity (full scale) Zero Span Leak Integrity Automatic Zero Zero Drift Thermal Siphoning and Attitude Sensitivity ≤ 1.0 sec (per SEMI E17-91) Linear 20% per sec (0 to 100% in 5 sec) ±1% setpoint (per SEMI E56-96) ±0.35% full scale (per SEMI E56-96) ±0.15% (per SEMI E56-96) ±0.5% (per SEMI E27-92) 0.007% per psi (N2) 0.05% full scale per °C 0.1% full scale per °C 1 x 10-10 atm-cc/sec (He) (per SEMI E16-90) Optional...

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Service & Support Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with outstanding service and support to back it up. We operate first class repair facilities located around the world to provide rapid response and support. Each location utilizes primary standard calibration equipment to ensure accuracy and reliability for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the relevant International Standards. Visit www.BrooksInstrument.com to locate the service location nearest...