DATA SHEET Pressure Mass Flow Controllers Model 5866RT Elastomer or Metal Sealed, Remote Transducer Pressure Controller / Flowmeter Model 5866RT Pressure Controller / Flowmeter Model 5866RT Pressure Controller/Flowmeter controls pressure while also measuring flow rate. The Model 5866RT receives a remote pressure transducer signal, and using adjustable integral PID control electronics and control valve, will maintain a desired set pressure. In addition to the pressure control function, the Model 5866RT provides a 0-5 V signal which is linear with mass flow rate. The Model 5866RT can also be configured as a mass flow controller for calibration or test purposes. • High accuracy • High leak integrity • Electropolished wetted surfaces (optional) • Pressure control and flow measurement • Compact design • Wide flow measurement range • Dynamic tuning adjustments with top mounted DIP switches • Electrically activated valve override Typical Upstream Configuration Typical Downstream Configuration When the controller is placed downstream of the pressure vessel, the flow is usually determined by a mass flow controller in the line upstream of the vessel. With the pressure controller upstream of the vessel, the inlet of the pressure controller can be at atmospheric gas pressure or at the vapor pressure of a liquid source. The flow in this situation is usually determined by the characteristics of a vacuum pump. A pressure controller system can be built in two different configurations as shown above. View Model 5866RT Product Page BrooksInst

Product Specifications PERFORMANCE Flow Range* Flow Output Signals Flow Accuracy Flow Repeatability Flow Temperature Coefficient Pressure Ranges Remote Pressure Sensor Input Pressure Setpoint Signal Pressure Ratings Pressure Equipment Directive (PED) 97/23/EC Any range from 0 to 3 sccm to 0 to 30,000 sccm N2Eq. 0-5 Vdc, max. load 1 k ohm ±1.0% full scale including linearity at the calibration conditions. ±1.5% full scale for flow rates greater than 20 slpm ±0.25% of rate 0.1% full scale/°C Dependent upon remote transducer Suitable for any pressure sensor with a 0-5 V or 0-10 V output signal 0-5...

Product Dimensions Model 5866RT Common Body with VCR and D-Connector Model 5866RT Common Body Downport and D-Connector

Service and Support Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with outstanding service and support to back it up. We operate first class repair facilities located around the world to provide rapid response and support. Each location utilizes primary standard calibration equipment to ensure accuracy and reliability for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the relevant International Standards. Visit www.BrooksInstrument.com to locate the service location nearest...