5850EMH Series
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DATA SHEET Thermal Mass Flow High Temperature, Metal Sealed, Thermal Mass Flow Controllers Originally developed and manufactured in Japan as a solution to support the growing fiber optic cable industry in Asia, the 585xEMH Series of high temperature mass flow controllers continue to be manufactured using the same supply chain and manufacturing process by Brooks Instrument in our Hatfield, Pennsylvania, USA facility. The 585xEMH Series remains the mass flow controller of choice for critical silicon precursor and dopant vapor delivery in optical fiber preform manufacturing. The Brooks Model 585xEMH High Temperature Metal Sealed Mass Flow Controller offers state of the art performance in high temperature gas measurement and control. It combines the outstanding leak integrity of metal seals with a variety of options which allow maximum application flexibility. The heart of the 585xEMH is the highly stable sensor which provides an electrical output signal linear with flow rate. This signal is used for indicating, recording and/or control purposes without the need for an auto-zero circuit. Model Descriptions 5850EMH Low Flow High Temperature Metal Sealed Mass Flow Controller with Analog 5851EMH High Flow High Temperature Metal Sealed Mass Flow Controller with Analogrange of features and options available, the SLA5800 Series provides users with a single platform to support a broad range of applications. Product Features • High leak integrity (less than 10-11 Pa.m3/s (10-10 atm.cc/s) He) • Normally closed valve (normally open valve optional) • Particulate-free • High purity 316L Stainless Steel • High flow capability (100 slpm N2) • Helium leak check ports • Wide flow range (0.003 – 100 slpm) • Electrically-activated valve override • Low command flow cutoff • TTL compatible “valve off” function View 5850EMH Series Product Page

Product Specifications PERFORMANCE Flow Range Flow Accuracy Control Range Response Time (Settling time within RATINGS Operating Temperature Range Maximum Pressure Rating Pressure Differential (Controller)* * Specify the operating differential pressure at time of request. Leak Integrity MECHANICAL Valve Type Normally Closed, Normally Open Primary Wetted Materials 316L and high alloy ferritic stainless steel Valve Seat Material Process Connection 316L stainless steel 1/4” MVCR COMMUNICATION PROTOCOL Electrical Connection Input Signal Output Signal Power Requirement 1 x 15-pin Male D-sub 0 - 5...

Model Code Code Description I. Code Option Option Description1 Base Model Number High Flow (10 - 100 lpm N2 equivalent) E-Series, Metal Seal, High Temperature Normally Closed Control Valve Normally Open Control Valve Temperature Range 5 meters cable (only available on 85°C calibration device) Horizontal, Base Down Vertical, Inlet Down Horizontal, Either Side Down Horizontal, Upside Down VIII. Orifice Consult Factory Consult Factory Sample Standard Model Code I II III 585 0 EMH

Service and Support Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with outstanding service and support to back it up. We operate first class repair facilities located around the world to provide rapid response and support. Each location utilizes primary standard calibration equipment to ensure accuracy and reliability for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the relevant International Standards. Visit www.BrooksInstrument.com to locate the service location...