DATA SHEET Mass Flow Controllers & Meters Elastomer Sealed, Analog, General Purpose Thermal Mass Flow Meters & Controllers for Gases The 5800 Series mass flow meters and mass flow controllers have gained broad acceptance as the standard for stability and reliability. These products have a wide flow measurement range and are suitable for a broad range of temperature and pressure conditions making them well suited for applications in chemical and petrochemical research, laboratory, analytical, fuel cell and life science among others. Highlights of the 5800 Series mass flow products include: industry leading long-term stability, accuracy backed by superior metrology systems and methods using primary calibration systems directly traceable to international standards, and a range of analog I/O options. The 5800 Series provides a highly configurable platform based on a simple modular architecture. The 5800 Series feature set was carefully selected to enable drop-in replacement of many brands of mass flow controllers. With the wide range of options and features available, the 5800 Series provides users with a single platform to support a broad range of applications. Features Benefits Features Benefits Industry leading long-term sensor stability Increased system uptime and reduced cost of ownership by reducing maintenance and eliminating periodic recipe adjustments and/or recalibrations Superior valve technology Minimum leak-by, wide turndown, and superior corrosion resistant materials reduces overall gas panel cost Adaptable mechanical configurations Easily retrofit to existing systems Primary standard calibration systems Ensures measurement accuracy is traceable to international standards Simple modular design and reducing total cost of ownership Easy-to-service elastomer sealed design provides for factory or field service maximizing uptime View 5800 Product Page

Product Description Advanced Thermal Flow Measurement Sensor Brooks’ sensor technology combines: • Excellent signal to noise performance for improved accuracy at low setpoints • Superior long-term stability through enhanced sensor manufacturing and burn in process • Isothermal packaging to reduce sensitivity to external temperature changes Wide Flow Range The 5800 Series covers an extremely broad range of flow rates. Model 5850 can have a full scale flow as low as 3 ccm. With a high turndown ratio of 50:1 repeatable gas flow can be measured or controlled down to 0.06 ccm! Model 5853 can monitor...

PERFORMANCE Flow Accuracy² Control Range Repeatability & Reproducibility Response Time (Settling Time within ±2% F.S. for 0-100% command step) E-Series: <3 seconds i-Series: <6 seconds Zero Stability Temperature Coefficient < + 0.2% F.S. per year Zero: <0.075% of F.S. per °C. Span: <1.0% of F.S. shift from original calibration over 10-50°C (50-122°F) range Pressure Coefficient Attitude Sensitivity <0.5% F.S. maximum deviation from specified accuracy after re-zeroing ²  Accuracy including linearity at calibration conditions. RATINGS Operating Temperature Range Minimum Pressure Differential (Controllers)³...

Product Dimensions 5850E, Card Edge Connector C onnection Type “X”Dim. 1/8” Compression Fitting 4.84/122.9 1 /4” Compression Fitting 5.02/127.5 3/8” Compression Fitting 5.14/130.5 1/4” Tube VCO® 4.56/115.8 1/4” Tube VCR® 4.88/124.0 Inches/Millimeters Connection Type “X” Dim 1/8” Compression Fitting 4.14/105.2 1/4” Compression Fitting 4.32/109.7 3/8” Compression Fitting 4.44/112.8 1/4” Tube VCO® 3.86/98.0 1/4” VCR®

Product Dimensions 5850E, Card Edge Connector C onnection Type “X”Dim. 1/8” Compression Fitting 4.84/122.9 1 /4” Compression Fitting 5.02/127.5 3/8” Compression Fitting 5.14/130.5 1/4” Tube VCO® 4.56/115.8 1/4” Tube VCR® 4.88/124.0 Inches/Millimeters Connection Type “X” Dim 1/8” Compression Fitting 4.14/105.2 1/4” Compression Fitting 4.32/109.7 3/8” Compression Fitting 4.44/112.8 1/4” Tube VCO® 3.86/98.0 ® 1/4” VCR 4.1

Product Dimensions 5853E, Card Edge Connector With Fittings 5853E, Card Edge With Flanges 5853E/5853i, 15-Pin D Connector With Fittings 5853E/5853i, 15-Pin D Connector With Flanges Connection Type Female Pipe Thread 1/2” Tube Compression* 3/4” Tube Compression* 1” Tube Compression* 1/2” VCO** (100 slpm max.) 3/4” VCO* 1/2” VCR** (100 slpm max.) 1/2 VCR* * 1-1/16 - 12 UNF Connection To Body ** 9/16 - 18 UNF Connection To Body

Product Dimensions 5863E/5863i, 15-Pin D Connector With Fittings Connection Type “X” Dimension 5863E/5863i, 15-Pin D Connector With Flanges

Service and Support Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with outstanding service and support to back it up. We operate first class repair facilities located around the world to provide rapid response and support. Each location utilizes primary standard calibration equipment to ensure accuracy and reliability for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the relevant International Standards. Visit www.BrooksInstrument.com to locate the service location nearest...