4800 Series
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DATA SHEET Mass Flow Controllers & Meters 48XX Series Ultra-fast Responding, Compact, Thermal Mass Flow Controllers & Meters Model 4850 The Brooks 48xx Series features a broad flow range, compact size, a variety of analog and digital I/O options, a MEMS-based sensor that provides lightning fast response times, and many other benefits for a variety of applications. The 48xx Series of mass flow controllers and mass flow meters is fully RoHS compliant and is an excellent choice for measurement and control of many common gases including air, N2, O2, Ar, He, H2, CO2, CO, N2O, CH4, C3H6 (Propene), and C3H8. The optional Local Operator Interface (LOI) provides a convenient user interface to view, control, and configure the 48xx Series devices eliminating the need for remote secondary electronics. The 48xx Series MEMS-based sensor provides lightning fast response times. The 48xx Series utilizes a Micro Electro Mechanical System (MEMS) based thermal sensor. Similar to typical thermal sensors, it measures a change in temperature to determine mass flow rate. The difference is that gas flows directly across the sensor, achieving extremely fast response times. Figure 1 Gas Flow Across the MEMS Sensor View 48XX Series Product Page

Product Description Fast settling times and stable control come standard with the 4850 controller. The Model 4850 controller uses a proprietary PID algorithm to optimize the control valve response to ensure rapid settling times. The 4850 controller can be counted on to quickly match actual mass flow to any changes in setpoint. Good things come in small packages. The MEMS sensor enables a dramatic reduction in size compared to traditional thermal mass flow controllers and thermal mass flow meters. In fact the compact size of the 48xx Series 1” x 3” x 4” (25mm x 76mm x 101mm) takes up less...

Power Connection Local Operator Interface Module Easy to use Jog dial button Large backlit LCD Secure mount to 4800 Series device Status LEDs Variety of mechanical connections available including downport Compact size Figure 5 48xx Series with Local Operator Interface Fast response time Ensure rapid step during process recipe changes Compact size Reduces space and eases installation Optional Local Operator Interface (LOI) Provides a turnkey solution for local indication, set point control and device configuration eliminating the need for remote secondary electronics Low pressure drop across...

Product Specifications PERFORMANCE Full Scale Flow Range 50 ml/min - 40 l/min (50 sccm - 40 slpm) (N2 eq., at 0oC Ref, with typical 50 psid pressure differential) Control Range Flow Accuracy Flow Repeatability Response Time Flow signal: <0.3 sec Flow control: Settling time <0.75 sec from 0 to 100% FS (typical <0.5 sec for all steps) Temperature Coefficient RATINGS Gases Air, N2, O2, Ar, He, H2, CO2, CO, N2O, CH4, C3H6 (Propene), C3H8 (other gases upon request) Operating Limits Pressure Temperature Humidity Differential Pressure Range (Controllers) Minimum: 0.35 bar (5 psid) Maximum: 10 bar...

Product Dimensions 48xx Standard Process and Downport Connections Figure 6 Dimensions for 48xx Series Devices with Standard Process Connections Figure 7 Dimensions for 48xx Series Devices with Downport Connections 5

Product Dimensions - LOI Module Figure 8 Dimensions for 48xx Series LOI Module Table 1 48xx Series Pin-Out Diagram 15 Pin D-Sub Connector Access our library of CAD Drawings

Product Certifications These certifications cover the 48xx Series thermal mass flow devices as well as the Local Operator Interface (LOI). Mark Certification/ Marking/ Directive Class I, Div 2 Groups A, B, C & D; T4 Class 1, Zone 2, AEx nA II T4 Ex nA II T4 II 3 G Ex nA II T4 EMC Directive 2014/30/EU RoHS Directive 2011/65/EU Pressure Equipment Directive 2014/68/EU Applicable Standard EMC RoHS Sound Engineering Practice (SEP) Hazardous Location Classification The modules shall be installed in a suitable enclosure providing a degree of protection of at least IP54 according to EN 60529,...

Model Code Code Description Code Option Option Description Base Model Number RS-232 + Analog, Select applicable analog I/O Model Revision Level Analog I/O, Input / Output Power Supply Mechanical Connections Flow Controller, Body 0 (50 sccm-40 slpm) Flow Meter, Body 0 (50 sccm-40 slpm) 9/16” -18unf straight thread 1/4” tube compression w/filter 1/8” tube compression w/filter 3/8” tube compression w/filter 1/4” VCR w/filter 1/4” VCO w/filter 1/4’ NPT-F w/filter 6mm tube compression w/filter 10mm tube compression w/filter Downport, no O-ring cavity 1/4” Rc (BSPT) w/filter Downport, with O-ring...

Model Code Code Description X. Mass Flow Restrictor Type Option Description Type or Restrictor No Restrictor Plug K M N P Q R S T U V W X Y 1 2 3 4 5 Calibration Condition None-Uncalibrated Single Gas Single Gas Single Gas Single Gas XII. Accessories XIII. Certificates None LOI with Power Adapter LOI without Power Adapter None Multiple Certs. Describe required certs in notes. Add all applicable changes to list price. Declaration of Compliance 2.1 (Certificate of Conformance) Declaration of Compliance 2.1 Leak Test Declaration of Compliance 2.1 Pressure Test Declaration of Compliance 2.1...