DATA SHEET Pressure Gauges 2 Inch Stainless Steel Indicating Pressure Gauges The Brooks Instrument Models S122/C122/F122 Series 2 inch stainless steel gauges were designed and developed for the demanding high-purity applications of the semiconductor industry. With an accuracy of 1% of full scale, the 2 inch gauges offer a reliable and efficient way to monitor pressure locally. This durable measuring device comes in a variety of process connections, pressure ranges, and socket orientations. Stainless steel movement providing precision performance Variety of models and pressure ranges to support specific design needs 316L stainless steel wetted parts Gauges welded in oxygen-free chambers to meet rigid cleanliness and safety guidelines Applications Gas delivery systems and tools used for semiconductor processing, including: • Bulk gas • Gas cabinets • Gas distribution • Gas panels View S122/C122/F122 Product Page

Product Specifications Socket Orientation Pressure Ranges S122: Stem mounted C122: Center back mounted F122: Center back mounted withstainless steel front flange Vacuum to 4,000 PSI (276 bar). Metric also available (See Range Tables) Helium Leak Check Proof Pressure 110% Burst Pressure 400% Operating (ambient) Cleaned for oxygen service to ANSI B40.1 level IV specifications Safety Relief Unrestricted rear blow-out plug Face-seal male, face-seal swivel male, face-seal swivel female and 1/4” NPT male White with black marking; “Use No Oil” is red Approximate Shipping Weight MATERIALS OF CONSTRUCTION...

Product Dimensions Model Code Code Description Code Option Option Description Stem mounted Center back mounted Center back mounted with stainless steel front flange 2” stainless steel gauges See options in Range Tables Pounds per Square Inch Pounds per Square Inch and Bar Megapascal Bar Pounds per Square Inch and Kilograms per Square Centimeter Face seal swivel male Face seal swivel female 1/4” NPT male Sample Standard Model Code

Service and Support Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with outstanding service and support to back it up. We operate first class repair facilities located around the world to provide rapid response and support. Each location utilizes primary standard calibration equipment to ensure accuracy and reliability for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the relevant International Standards. Visit www.BrooksInstrument.com to locate the service location nearest...