SEMICONDUCTOR MARKET (Ultra) low flow Coriolis competence

Bronkhorst® is a supplier to many of the world’s biggest and most respected companies. Our Coriolis Mass Flow Meters and Controllers can be used in various applications: Bronkhorst® specializes in low flow Mass Flow Meters and Controllers for liquids and gases. Our Coriolis principle based instruments are designed to accurately measure and control flow ranges from 0.1 g/h up to 600 kg/h. They are suitable for numerous applications within semiconductor, laboratory and chemical environments. Combined with a (gear) pump or (shut-off) valve, compact liquid mass flow dosing systems can be offered...

The innovating Semiconductor market Due to faster and smaller semiconductor devices and higher levels of integration, a higher precision in the production process is required. To increase the wafer production process, new materials are being used. Wafer Cleaning Cleaning with supercritical CO2 will be the ‘next generation’ cleaning method as supercritical CO2 has the following advantages: • Zero surface tension (no wafer damage) • A tunable density • Environmentally friendly (non toxic) • A recyclable process. With regard to wafer cleaning, the Coriolis instruments of Bronkhorst® offer the following...

There are several types of CVD processes in which a (mini) CORI-FLOW™1 sensor is able to improve and simplify the process significantly. Bronkhorst® instruments introduce the following benefits: • High accurate vapor flow control and excellent reproducibility • Excellent batch-upscaling • Fluid independent; no recalibration needed during the process. To create a mixture of gases and liquids in a CVD process, bubblers are most commonly used. A Bronkhorst® CEM system can replace the bubbler system eliminating the bubbler's disadvantages. The advantages of a CEM system in comparison with a regular...

How to reduce production costs by using a (mini) CORI-FLOW™ controller Using conventional mass flow instruments requires regular recalibration of the instruments to ensure constant accuracy, especially when changing the fluids. If we look at Coriolis instruments, we see that recalibration is not necessary. This can save a lot of costs. Figures below show an overview of cost savings possible for flat panel display production: Calculations based on the use of mini CORI-FLOW™ instruments Calculation of the total savings possible by using a Bronkhorst Coriolis instrument (e.g. an ML120) based on: 1....

The benefits of (mini) CORI-FLOW™ Bronkhorst® Coriolis Mass Flow Meters and Controllers are known for their high accuracy, repeatability and employability for multiple fluids. They behave like scales for flowing mass. Besides this they provide a fast response and a capability to measure and optionally control very low flow rates. Looking specifically at the semiconductor market, the benefits below are important. Repeatability During processes like wafer cleaning and layer deposition, the repeatability of the process has an important role. The solutions of Bronkhorst® make sure the repeatability...

Bronkhorst® FlowWare, free software tools For the convenience of their customers, Bronkhorst developed various software tools, to support the operation of their digital mass flow meters and controllers. Typical functions • e-ranging mini CORI-FLOW™ instruments R These software tools are suitable for operation by personal Coriolis instruments are very linear, therefore the instruments computer and available free of charge. can be rescaled at any desired value within the specifications of the instrument. Optimizing (PID) controller settings products of Bronkhorst® have an integrated PID controller....

Bronkhorst® Fluidics Handling Solutions for the Semicon Market Coriolis Mass Flow Meters and Controllers Precise and compact Mass Flow Controllers (MFCs) for gases and liquids, based on the Coriolis measuring principle, designed to cover the needs of the low flow market. The MFCs offer “multirange” functionality: factory calibrated ranges can be rescaled by the user, maintaining the original accuracy specs. Standard digital communication over RS232, optional fieldbus communication: PROFIBUS DP, DeviceNet™, Modbus-RTU, FLOW-BUS. On ML120 series also PROFINET and EtherCAT®. Thermal Mass Flow Meters...