mini CORI-FLOW ML120 Coriols Mass Flow Meters/Controllers for (ultra) low flow ranges
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mini CORI-FLOW ML120 Coriols Mass Flow Meters/Controllers for (ultra) low flow ranges - 1

mini CORI-FLOW Series ML120 (Ultra) Low Flow Coriolis Mass Flow Meters / Controllers Introduction mini CORI-FLOW™ series by Bronkhorst® are precise and compact Mass Flow Meters and Controllers, based on the Coriolis measuring principle. Designed to cover the needs of the (ultra) low flow market, there is a range of models to overlap flow ranges from 5 g/h up to 300 kg/h (full scale values), each offering “multi-range” functionality: factory calibrated ranges can be rescaled by the user, maintaining the original accuracy specs. As a result of this, customers are able to reduce the variety of instruments and thus reduce the cost of ownership. Superior Coriolis flow sensor Instruments of the mini CORI-FLOW™ series contain a uniquely shaped, single loop sensor tube, forming part of an oscillating system, providing superior flow measurement performance. When a fluid flows through the tube, Coriolis forces cause a variable phase shift, which is detected by sensors and fed into the integrally mounted pc-board. The resulting output signal is strictly proportional to the real mass flow rate. Coriolis mass flow measurement is fast, accurate, easy to install and inherently bi-directional. The mini CORI-FLOW™ features density and temperature of the fluid as secondary outputs. mini CORI-FLOW™ Series ML120 Bronkhorst® designed the new ML120 to offer highest performance at the world’s lowest flow rates to be measured with a Coriolis instrument: from 0,05…5 g/h up to 2…200 g/h. The ML120, comprising both a Mass Flow Meter (MFM) and a Mass Flow Controller (MFC), feature smallest physical dimensions and lowest internal volume. The new Coriolis sensor shows little to no variance over a long period of operation, thus reducing the system downtime. The MFC contains a microprocessor based pc-board with signal and fieldbus conversion and a PID controller for mass flow control by means of the integrated piezoelectric control valve. The flow controller only requires (less than) 1 second settling time. This makes the Coriolis MFC an ideal device for fast, repetitive dosing and filling processes for precursors, additives, solvents, etc. Fields of application Applications can be found in compound semiconductor processing, in solar cell and FPD technology, in food and pharmaceutical industries, in medical, microchemical or analytical installations, in calibration laboratories, amongst many others. Features of the Coriolis principle > Direct mass flow measurement, independent of fluid properties > Fast response > High accuracy > Additional density and temperature outputs > Bi-directional measurement Benefits of the ML120 > owest flow ranges on the market (Coriolis principle): L from 50 mg/h up to 200 g/h > Very small internal volume > Compact, space saving design > Easy to install (low risk of gas bubble inclusion) > Integrated digital controller for accurate flow or batch delivery > Excellent repeatability and long-term stability > Multi-range: easy on site re-ranging via digital interface > Fieldbus connection options: EtherCAT®, Modbus, DeviceNet™, PROFIBUS DP, FLOW-BUS, PROFINET > Saves expensive fluids at repetitive dosing and filling processes > Reduced downtime: no recalibration required after fluid change > No periodical recalibration required

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mini CORI-FLOW ML120 Coriols Mass Flow Meters/Controllers for (ultra) low flow ranges - 2

Technical specifications Flow ranges Mechanical parts Minimum full scale Material (wetted parts) Stainless steel 316L or comparable Nominal flow Single tube, DN 0.25; frequency 170 Hz ±20 Hz Maximum full scale Process connections (welded) Compression type or face seal couplings Minimum flow Seals Kalrez® Ingress protection (housing) IP40 Piezoelectric + metal plunger Leak integrity Pressure rating MFC: 5 bara (higher on request) Performance Mass flow accuracy Liquid: ±0,2% of rate; Gas: ±0,5% of rate based on digital output Warm-up time approx. 1/2 hour after power up Power supply...

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