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mini CORI-FLOW M12-M14

mini CORI-FLOW M12-M14
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mini CORI-FLOW M12-M14

Product catalog summary
Introduction to Coriolis Flow Measurement
The document introduces the Coriolis principle, which is utilized in mass flow meters to measure fluid flow through a vibrating tube. This method provides direct mass flow measurement with high accuracy and fast response times, eliminating the need for corrections related to density, pressure, and temperature.
mini CORI-FLOW™ Series Overview
The mini CORI-FLOW™ series by Bronkhorst® is designed for precise and compact mass flow measurement and control, especially for low flow rates. These instruments are suitable for both gases and liquids, featuring a robust IP65 weatherproof housing and optional ATEX approval for hazardous areas. They offer multi-range functionality, allowing users to rescale factory-calibrated ranges while maintaining accuracy.
Technical Specifications
The series includes models M12, M13, and M14, covering flow ranges from 0.1 g/h to 30 kg/h. The instruments provide direct mass flow measurement independent of fluid properties, with high accuracy and repeatability. They support digital communication interfaces such as RS232 and fieldbus options, and offer additional outputs for density and temperature.
Applications
mini CORI-FLOW™ instruments are applicable in various industries, including semiconductor processing, fuel cell technology, food and pharmaceutical industries, and liquid dosing systems. They are particularly advantageous for measuring unknown fluids or variable mixtures and can handle super-critical gases.
Mass Flow Controllers
The mini CORI-FLOW™ Mass Flow Controllers integrate adaptable PID control for fast and smooth control of electronically driven valves. They are designed to replace traditional thermal MFCs, offering better accuracy and independence from fluid properties. The controllers have the same footprint as thermal MFCs and support both analog and digital outputs.
Conclusion
The mini CORI-FLOW™ series provides a compact, cost-effective solution for accurate mass flow measurement and control, suitable for a wide range of industrial applications. Its advanced digital technology and robust design make it a versatile choice for both liquid and gas flow applications.
Control Performance
The mini CORI-FLOW™ controllers offer highly stable control output and fast response times, making them suitable for applications requiring rapid adjustments, such as dosing. The response time of the sensor ranges from 50 to 200 milliseconds.
Dimensions
The document lists dimensions for different models of the Mass Flow Controller, indicating compatibility with various connection types (e.g., ¼” OD, 1⁄8” OD, ¼” VCR).
Features of Liquid Dosing Systems
These systems are compact, easy to use, and do not require pressurization of the liquid source. They offer high accuracy and stability, with adjustable PID controllers and various communication options (analog and digital).
Alternative Control Methods
For applications where control valves are not suitable, Bronkhorst® offers gear pumps and other pump types that can be integrated with the Coriolis flowmeter for virtually pulse-free operation.
Applications
The mini CORI-FLOW™ series is suitable for gas or liquid precursor delivery in deposition processes, additive dosage, and batch counting. The systems can handle supercritical gas measurement and control, such as CO2, due to their true mass flow measurement capability.
Technical Specifications
The document provides detailed specifications for flow ranges, mechanical parts, performance, and electrical properties. It includes information on material options, pressure ratings, accuracy, repeatability, and communication interfaces.
Model Number Identification
A detailed breakdown of model numbers is provided, explaining the coding for flow meters, control valves, communication options, analog output, connections, supply voltage, internal seals, and wetted materials.
Conclusion
The mini CORI-FLOW™ systems by Bronkhorst® offer versatile and precise solutions for flow measurement and control in various industrial applications, with a focus on accuracy, stability, and ease of integration.
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Catalog excerpts

mini CORI-FLOW M12-M14-1

mini CORI-FLOW Compact Coriolis Mass Flow Meters & Controllers for

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mini CORI-FLOW M12-M14-2

Facts about Coriolis Flow Measurement and Control 3 Mass Flow Meters 4 Mass Flow Controllers 8 Liquid Dosing Systems 10 Model number identification 15

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mini CORI-FLOW M12-M14-3

Facts about Coriolis Flow Measurement and Control Coriolis principle of operation In 1835 Gaspard-Gustave Coriolis, a French scientist, described the effect that moving objects deflect from a straight path when they are viewed from a rotating frame of reference. In the nineteen seventies the “Coriolis effect” started to find applications in mass flow meters: a fluid flows through a vibrating tube and causes changes in frequency, phase shift or amplitude, proportional to the mass flow through the tube, giving the density of the fluid as secondary output. The mini CORI-FLOW solution TM Coriolis...

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mini CORI-FLOW M12-M14-4

mini CORI-FLOW” series by Bronkhorst® are precise and compact Mass Flow Meters and Controllers, based on the Coriolis measuring principle. Designed to cover the needs of the low flow market, there are 3 models to overlap flow ranges from 5 g/h up to 30 kg/h (full scale values), each offering "multi-range" functionality: factory calibrated ranges can be rescaled by the user, maintaining the original accuracy specs. As a result of this, customers are able to reduce the variety of instruments and thus reduce the cost of ownership. The instruments are equipped with a robust IP65 weatherproof housing...

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mini CORI-FLOW M12-M14-5

Digital Mass Flow Meter/Controller Application on liquids mini CORI-FLOW” can be applied for most liquid types. The mass flow meters are fully metal sealed, controllers have a high performance elastomeric valve seat, made of Kalrez®. Coriolis flow meters are unmatched in accuracy. When applied for liquids, the mass flow accuracy is better than ±0,2% Rd. The trumpet graph below illustrates the total mass flow accuracy of an M13 Mass Flow Meter used on liquid. Total accuracy M13 on liquid (±0,2% Rd + ±0,2 g/h ZS) mini CORI-FLOW Mass Flow Meter with local readout module, mounted on an optional heavy...

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mini CORI-FLOW M12-M14-6

Application on gases in comparison with thermal mass flow devices, the Coriolis measuring principle offers the following advantages: • no conversion factors (if scaled in units of weight) • possibility to measure unknown fluids or variable mixtures • can measure (super-) critical gases • superior accuracy and response time For gas flow applications, the mass flow accuracy is better than ±0,5% Rd. The trumpet graph below illustrates the total mass flow accuracy of an M13 Mass Flow Meter used on gas. Supply pressure sensor for air (P2 = 1 bara, T = 20°C) When engineering your process system for...

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mini CORI-FLOW M12-M14-7

M12 Mass Flow Meter M13 Mass Flow Meter g/h ln/min g/h ln/min g/h ln/min g/h ln/min g/h ln/min g/h ln/min g/h ln/min g/h ln/min g/h ln/min g/h ln/min M14 Mass Flow Meter g/h ln/min g/h ln/min g/h ln/min g/h ln/min g/h ln/min g/h ln/min g/h ln/min g/h ln/min g/h ln/min g/h ln/min liquid liquid liquid liquid liquid liquid liquid liquid liquid liquid (1) For all gas flow values the measuring error Is ±0,5% Rd ± zero stability (2) "Liquid": Fluid will be In liquid phase under certain conditions: not recommended; phase changes In Instrument should be avoided! (3) For a gas flow meter the maximum flow...

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mini CORI-FLOW M12-M14-8

The pc-board of a mini CORI-FLOW” Mass Flow device features Integrated, adaptable PID control for fast and smooth control of any electronically driven control valve. Depending on the application this could be an integrated direct acting valve or a separately mounted valve for special tasks, e.g. a pressure actuated control valve. Integrated control valves for liquid applications have a purge connection on top of the sleeve that enables easy elimination of air or gas when starting up the system. For liquid dosing Bronkhorst® offers an alternative way to control the flow. Instead of using a control...

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mini CORI-FLOW M12-M14-9

Pressure drop Mass Flow Controllers As a rule of thumb the pressure difference (AP) across the control valve should be at least 50% of the total AP across the system for liquid applications, for gases preferably even higher (approx 75%). For control applications normally an MFC with integrated control valve will be preferred, because it is the most compact and economical solution. Sometimes, however, a separate control valve could be more practical or offer technical advantages. This could be a standard direct acting, electro magnetic control valve or, for instance, a pilot operated valve for...

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mini CORI-FLOW M12-M14-10

An alternative way of control in some applications it is not possible or not recommended to use a control valve, for instance when a vessel with liquid cannot be pressurised. As an alternative, Bronkhorst® can offer virtually pulse-free gear pumps, HPLC or diaphragm pumps, close-coupled to the Coriolis flowmeter. A mini CORI-FLOW” liquid dosing system consists of a Coriolis flow meter, a gear pump and interconnecting material. Furthermore Bronkhorst® will take care of electrical and mechanical connection, testing and, if possible optimisation including the PiD-integrated controller. mass flow...

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mini CORI-FLOW M12-M14-11

in deposition processes various precursor fluids must be accurately controlled, either in gas phase or as a liquid. The high precision Mass Flow Controllers of the mini CORI-FLOW” series are particularly suitable for these demanding applications. Thanks to the "multi-range" feature, Original Equipment Manufacturers (OEM customers) are able to drastically reduce the variety of spare instruments and thus the cost of ownership, since the instruments are easy to re-range. Many applications ask for compact, accurate measurement and control of additives to be proportionally dosed into a main flow....

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mini CORI-FLOW M12-M14-12

mini CORI-FLOW™ Applications Supercritical gas measurement and control Fluids like carbon dioxide (CO2) are difficult to measure when they move towards the inter-phase stage b etween being a liquid and a gas. For example, for CO2 this occurs at temperatures >31,1°C and pressures higher than approx. 73,8 bara. Under these conditions, physical properties like density (ρ) and heat capacity (Cp) change very rapidly as a result of pressure or temperature variations. This makes an accurate mass flow measurement, based on the thermal p rinciple, very difficult. in liquid phase or indeed somewhere in...

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