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Bronkhorst
METAL SEALED

METAL SEALED

Product catalog summary

Introduction
Bronkhorst High-Tech B.V. is a European leader in the design and manufacture of thermal Mass Flow Meters/Controllers and Electronic Pressure Controllers. The company offers a wide range of instruments tailored to customer specifications for various applications, including laboratory, industrial, and hazardous environments.

Metal Sealed Instruments
Since 1989, Bronkhorst has produced metal sealed Mass Flow and Pressure Meters/Controllers, particularly for the semiconductor market and high purity gas applications. These instruments feature high surface quality and modular construction with metal-to-metal seals for long-term leak tightness. Flow ranges start from 0.12 to 6 sccm up to 1 to 50 slm, with pressure ranges from 0.029 to 1.43 psi up to 18 to 900 psi.

Digital Design and Features
The instruments are equipped with a digital pc-board for high accuracy, temperature stability, and fast response. The EL-FLOW® design includes Multi Gas / Multi Range functionality for flexibility and efficiency. They support various communication protocols, including RS232, DeviceNet™, CANopen®, PROFIBUS DP, Modbus RTU/ASCII/TCP, FLOW-BUS, EtherCAT®, PROFINET, EtherNet/IP, and POWERLINK.

General Features

Patented metal-to-metal seal construction for leak tightness
High surface quality of wetted parts
Fast response and excellent repeatability
Flow ranges from 0.12 to 6 sccm up to 1 to 50 slm
Pressure ranges from 0.029 to 1.43 up to 18 to 900 psi
RoHS compliant

Technical Specifications
Mass Flow Measurement/Control System

Accuracy: ± 0.5% Rd plus ± 0.1% FS
Turndown: up to 1:150
Repeatability: < 0.2% Rd
Settling time: 1 second typical
Max. operating pressure: 1500 psig

Pressure Measurement/Control System

Accuracy: ± 0.5% FS
Pressure rangeability: Measurement 1:50
Repeatability: ≤ 0.1% RD
Response time: < 2 msec

Applications
These instruments are used in various applications, including gas composition fabrication, CVD and PVD processes, optical glass coatings, LED production, vacuum technology, solar power manufacturing, and semiconductor processes.

Enhanced Performance
Bronkhorst's latest technology offers faster, more stable, and user-friendly instruments with improved specifications, configurable for specific uses.

Model and Range Information
Details on models and ranges for Mass Flow Meters, Controllers, and Pressure Transducers/Controllers are provided, with specifications for minimum and maximum flow and pressure ranges.

Catalog excerpts

METAL SEALED Digital Mass Flow / Pressure Meters and Controllers

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General features Bronkhorst High-Tech B.V., European market leader in thermal Mass Flow Meters/Controllers and Electronic Pressure Controllers, has many years of experience in designing and manufacturing precise and reliable measurement and control devices. With a wide range of instruments, Bronkhorst offers innovative solutions for many different applications in many different markets. The instruments are made to customers’ specification, in various styles, suitable for use in laboratory, industrial environment, azardous areas, semiconductor or analytical installations. h patented metal-to-metal...

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Technical specifications MASS FLOW measurement / control system Mechanical parts Accuracy (incl. linearity) (based on actual calibration) Material (wetted parts) stainless steel 316L or comparable Process connections 1/4” face seal male Outer seals Valve seat (controllers) Kalrez® (FFKM); option: Viton® Settling time (controller) 1 second typical above 5% FS; option: down to 600 msec Ingress protection (housing) Control stability meter: controller: Temperature sensitivity zero: span: Electrical properties Power supply 30 min. for optimum accuracy 2 min for accuracy ± 2% FS 0,1% Rd/bar typical...

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Fields of application Both Mass Flow Meters / Controllers and Pressure Meters / Controllers are applied across a huge range of applications e.g. in the fabrication of gas compositions, for CVD and PVD, optical glass coatings, LED production, in vacuum technology and solar power (Photo-Voltaic) element manufacturing and also in semiconductor processes such as ion implantation, etching processes and atomic layer deposition (ALD). Depending on the chemical properties of the process gases and the level of particle cleanliness required, equipment builders often prefer to apply metal sealed equipment...

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Model number identification Model number identification PRESSURE Meters/Controllers A-NNNAA MASS FLOW Meters/Controllers - Base Model Pressure Meter - 1/4” VCR Forward Pressure Controller - 1/4” VCR Mass Flow Controller - 1/4” VCR- Mass Flow Meter - 1/4” VCR Base Model Back Pressure Controller - 1/4” VCR Sensor code Analog output Sensor code Analog output Factory selected Factory selected RS232 + Modbus RTU/ASCII (n/o control) Supply voltage Supply voltage Connections (in/out) 88 1/4” Face Seal male M RS232 + Modbus RTU/ASCII (n/c control) Valve seals M RS232 + Modbus RTU/ASCII (n/c control)...

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Bronkhorst High-Tech designs and manufactures innovative instruments and subsystems for low-flow measurement and control for use in laboratories, machinery and industry. Driven by a strong sense of sustainability and with many years of experience, we oﬀer an extensive range of (mass) flow meters and controllers for gases and liquids, based on thermal, Coriolis and ultrasonic measuring principles. Our global sales and service network provides local support in more than 40 countries. Discover Bronkhorst®! Bronkhorst High-Tech B.V. Nijverheidsstraat 1a NL-7261 AK Ruurlo, The Netherlands

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All Bronkhorst catalogs and technical brochures

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