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FLOW-SMS

FLOW-SMS

FLOW-SMS

Product catalog summary
Introduction
Bronkhorst High-Tech B.V. is a leader in designing and manufacturing precise measurement and control devices, offering a wide range of instruments for various applications across different markets.

FLOW-SMS Series Overview
The FLOW-SMS series is designed for optimal space efficiency, allowing for the combination of mass flow or pressure sensor modules with various functional modules on a compact mounting rail system. This modular concept offers flexibility for modifications and serviceability.

Applications
The FLOW-SMS series is suitable for markets such as vacuum, plasma, sputter and coating processes, semiconductor and solar cell fabrication, burner control, and biotechnological and chemical installations.

Features
  • Compact assembly for space efficiency
  • Economical with low ownership cost
  • Tubeless construction to reduce leak points
  • Service-friendly with top access
  • Pre-tested units for reduced custom testing
  • Digital features with various fieldbus interfaces

Technical Specifications
Mass Flow Modules: Accuracy of ±0.5% Rd, turndown ratio of 1:50, and max operating pressure of 10 bar gauge.
Pressure Modules: Accuracy of ±0.5% FS, with a pressure rangeability of 1:50.

Functional Modules
  • Mass flow meters/controllers use heat transfer principles for measurement.
  • Pressure meters/controllers offer high accuracy and repeatability.
  • Filter modules protect instruments from particles.
  • Solenoid and pneumatic operated shut-off valves provide safety and control.

Manifold Components
  • Support rails for mounting
  • Base bodies for module support
  • Distribution and mixing chambers for gas flow management
  • Adapter and blind plates for connection management

Configuration Software Tool
Bronkhorst offers an online configuration tool to assist in designing bespoke FLOW-SMS systems by arranging functional modules and components.

Contact Information
Bronkhorst High-Tech B.V., Nijverheidsstraat 1a, NL-7261 AK Ruurlo, The Netherlands. Tel. +31 573 458800, [email protected], www.bronkhorst.com
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Catalog excerpts

FLOW-SMS-1

FLOW-SMS Surface Mount Sub-Systems for Mass Flow / Pressure Meters and Controllers

 Open the catalog to page 1
FLOW-SMS-2

Bronkhorst High-Tech B.V., the European market leader in Thermal Mass Flow Meters/Controllers and Electronic Pressure Controllers, has many years of experience in designing and manufacturing precise and reliable measurement and control devices. With a wide range of instruments, Bronkhorst offers innovative solutions for many different applications in a variety of different markets. > FLOW-SMS series, compact assemblies of functional modules Bronkhorst developed the FLOW-SMS series for customers who are looking for process gas panels with optimal space efficiency. On a compact, lightweight but...

 Open the catalog to page 2
FLOW-SMS-3

> Technical specifications Mass Flow / Pressure ModulesMASS FLOW measurement / control modules Accuracy (incl. linearity) standard: ±0,5% Rd plus ±0,1% FS; (based on actual calibration) for ranges 3,5 mln/min: ± 1% FS Turndown 1 : 50 (in digital mode up to 1 : 187,5) Settling time (controller) 1,2 seconds typical above 5% FS; Control stability < ± 0,1% FS (typical for 1 ln/min N2) Max. operating pressure 10 bar gauge Temperature sensitivity zero < 0,05% FS/°C; Pressure sensitivity 0,1% Rd/bar typical N2, Warm-up time 30 min. for optimum accuracy Accuracy (incl. linearity) ± 0,5% of full scale...

 Open the catalog to page 3
FLOW-SMS-4

FUNCTIONAL MODULES Mass flow meters / controllers The mass flow sensor operates on a principle of heat transfer by sensing the temperature difference along a heated section of a capillary tube. Part of the total flow is forced through the capillary by means of a laminar flow element in the main stream generating a pressure difference. The design of the laminar flow device is such that flow conditions in both the capillary and laminar flow device are comparable, thereby resulting in proportional flow rates through the meter. The ΔT sensed by the upstream and downstream temperature sensors on the...

 Open the catalog to page 4
FLOW-SMS-5

MANIFOLD COMPONENTS The functional modules described on the previous page are mounted on a modular manifold assembly, consisting of support rails, base bodies, distribution and mixing chambers and adapter or blind plates. Support rails Configuration software tool Each FLOW-SMS system is supported by two mounting rails, which also provide panel mounting capability for the total system. There are support rail sets for 3 up to 9 channels available. Because of the infinite number of possible solutions, we recommend you to contact our nearest distributor to discuss your application. With the online...

 Open the catalog to page 5
FLOW-SMS-6

Bronkhorst High-Tech designs and manufactures innovative instruments and subsystems for low-flow measurement and control for use in laboratories, machinery and industry. Driven by a strong sense of sustainability and with many years of experience, we offer an extensive range of (mass) flow meters and controllers for gases and liquids, based on thermal, Coriolis and ultrasonic measuring principles. Our global sales and service network provides local support in more than 40 countries. Discover Bronkhorst®! Bronkhorst High-Tech B.V. Nijverheidsstraat 1a NL-7261 AK Ruurlo, The Netherlands

 Open the catalog to page 6

All Bronkhorst catalogs and technical brochures

  1. EL-FLOW Base

    4  Pages

  2. LOW-ΔP-FLOW

    8  Pages

  3. METAL SEALED

    6  Pages

  4. IQ+FLOW

    6  Pages

  5. MASS-VIEW

    8  Pages

  6. BRIGHT

    4  Pages

  7. E-8000

    8  Pages

  8. MAG-VIEW

    3  Pages

  9. MANI-FLOW

    1  Page

  10. FLOW-ADJUST

    2  Pages

*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.