Digital Thermal Mass Flow Meters and Controllers for Gases

Introduction Bronkhorst High-Tech B.V., the European market leader in low flow thermal and Coriolis Mass Flow Meters/Controllers, has many years experience in designing and manufacturing precise and reliable measurement and control devices. With a wide range of instruments, Bronkhorst offers innovative solutions for many different applications in many different markets. The instruments are made to customers’ specification, in various styles, suitable for use in laboratory, industrial and hazardous areas, in such diverse applications as semiconductor and analytical installations, to name but two....

Technical specifications Models and flow ranges (based on Air) Measurement / control system Mass Flow Meters (MFM); PN100 (pressure rating 100 bar) Accuracy (incl. linearity) (based on actual calibration) standard: ±0,5% Rd plus ±0,1%FS; ±0,8% Rd plus ±0,2% FS for F-110C-005/F-200CV-005; ±2% FS for F-110C-002/F-200CV-002 Settling time (controller) standard: 1…2 seconds; option: down to 500 msec For ranges of 200 or 400 bar rated MFMs see model number identification. Control stability Operating temperature Mass Flow Controllers (MFC); PN64 / PN100 zero: < 0,05% FS/°C; span: < 0,05% Rd/°C Temperature...

Table with minimum and maximum flow ranges for EL-FLOW®Select instruments suitable for Multi Fluid / Multi Range functionality (valid for operating conditions from 0.8 to 10 bar abs and 0 to 70°C) EL-FLOW Select MFM Model # EL-FLOW Select MFC Model # Air flow ranges Minimum/Nominal/Maximum Min/Max flow ranges for other gases Ar Min. 0,014 - 0,7 mln/min Nom. 0,014 - 2 mln/min Max. 0,014 - 5 mln/min Min. 0,06 - 3 mln/min Nom. 0,06 - 5 mln/min Max. 0,06 - 9 mln/min Min. 0,16 - 8 mln/min Nom. 0,16 - 20 mln/min Max. 0,16 - 30 mln/min Min. 0,4 - 20 mln/min Nom. 0,4 - 50 mln/min Max. 0,4 - 75 mln/min...

Multi Gas / Multi Range is optional on the Select series and must be requested at the point of ordering Extended rangeability for digital communication only; turndown 50:1 when using analog I/O options The selected orifice of the control valve may limit the rangeability Standard accuracy (based on actual calibration): ±(0,5% RD + 0,1% FS); ±0,8% Rd plus ±0,2% FS for F-110C-005/F-200CV-005; ±2% FS for F-110C-002/F-200CV-002 Maximum range for gases not mentioned in this list; rule of thumb: nominal range for Air x Conversion Factor; e.g. F-111B - 1K0: maximum range for SF6 = 1000 x 0.27 = 270 mln/min...

Mass Flow Meter Model Burner control using Mass Flow Controllers brings many advantages compared to conventional systems, where flow is adjusted through needle valves. When burner orifices get clogged or when gas supply pressure varies, an MFC will automatically adapt to the changed conditions. For the control of relatively large flows with low differential pressure, which is typical for natural gas or CH4, Bronkhorst offers mass flow meters with separate pressure compensated bellows valves. Mass Flow Controller Model MFC’s are often used to make precise and stable mixtures of two or more gases....

Model number identification F Valve only Nominal range Factory selected Communication (I/O) Pressure rating Connections (in/out) 1/8“ OD compression type 1/4” Face seal male Internal seals Viton® (factory standard) Kalrez® (FFKM) Ranges for PN64/PN100 Flow Meters/Controllers 0C/0CV Analog output

Bronkhorst High-Tech designs and manufactures innovative instruments and subsystems for low-flow measurement and control for use in laboratories, machinery and industry. Driven by a strong sense of sustainability and with many years of experience, we offer an extensive range of (mass) flow meters and controllers for gases and liquids, based on thermal, Coriolis and ultrasonic measuring principles. Our global sales and service network provides local support in more than 40 countries. Discover Bronkhorst®! Bronkhorst High-Tech B.V. Nijverheidsstraat 1a NL-7261 AK Ruurlo, The Netherlands