World’s most versatile Mass Flow Meters / Controllers for Gases

Cutting edge technology EL-FLOW Prestige is the latest generation of Bronkhorst® Mass Flow Meters/ Controllers for gases. Nearly all core components have been redesigned and many improvements and innovations have been incorporated. With this series, Bronkhorst introduced the 'Differential Temperature Balancing' technology, ensuring a superb sensor stability. Power efficient microprocessors with innovative multistage control loops have been applied to achieve enhanced dynamic behavior. The metal housing is of robust yet compact design. Enjoy the benefits! Innovative sensor: gradient insensitive,...

Technical specifications Models and flow ranges (based on N2) Mass Flow Meters Measurement / control system Accuracy (incl. linearity) (based on actual calibration, according SEMI E69) standard: ±0,5% Rd plus ±0,1% FS (±0,8% Rd plus ±0,2% FS for ranges 3…5 mln/min; ±1% Rd plus ±1% FS for ranges < 3 mln/min) Multi Gas/Multi Range gases embedded gas data for 100 unique gases (see FAQ section on our website) plus any mixture of maximum 5 of these gases. Settling time fast: standard: slow: Operating temperature Temperature sensitivity zero: span: Pressure sensitivity standard: with pressure correction:...

FG-201CS Mass Flow Controller with inte

Real-time temperature and pressure compensation Efficiency and yield in a process require a stable gas flow. This gas flow can be accurately measured and controlled by EL-FLOW Prestige Mass Flow Controllers (MFCs). Various external factors can have influence on the measurement accuracy and control stability of MFCs, e.g. temperature fluctuations and line-pressure fluctuations. EL-FLOW Prestige instruments feature accurate temperature compensation, correcting the flow measurement for temperature changes. Compensation of pressure changes can either be achieved by an external pressure transmitter...

Customized Input/Output configurations External reset counter Besides the obvious I/O-options for measured and setpoint values via analog signals, RS232 or fieldbus communication, EL-FLOW Prestige features a programmable pin (pin 5) at the 9-pin sub-D connector for customized I/O configurations. This functionality can be used for advanced operations such as digital frequency/pulse output, alarm output/reset, processing an external setpoint signal, valve purge/close and analog valve output. Some options are specified in the model number identification, however, numerous other settings can be programmed...

Model number identification FG - Analog output Customized IO options (pin 5, advanced operation) Supply voltage Disabled, pin 5 is pulled down to 0 Vdc (default selection) 0…10 Vdc output, controller Analog signal for pump or external valve steering (control signal only) 4…20 mA output, controller Analog signal for pump or external valve steering (control signal only) 3,8…20,8 mA sourcing output, controller Analog signal for Badger Meter valve with TEIP11 signal converter (control signal only) Digital output, min/max alarm During a min/max alarm, pin 5 is pulled down to 0 Vdc Digital output,...

Bronkhorst High-Tech designs and manufactures innovative instruments and subsystems for low-flow measurement and control for use in laboratories, machinery and industry. Driven by a strong sense of sustainability and with many years of experience, we offer an extensive range of (mass) flow meters and controllers for gases and liquids, based on thermal, Coriolis and ultrasonic measuring principles. Our global sales and service network provides local support in more than 40 countries. Discover Bronkhorst®! Bronkhorst High-Tech B.V. Nijverheidsstraat 1a NL-7261 AK Ruurlo, The Netherlands