CEM/VDM-Systems Solutions for Vapour Flow Control
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CEM and VDM Solutions for Vapour Flow Control

Introduction Bronkhorst High-Tech B.V. has many years of experience supplying mass flow control solutions for many different applications within such markets as semiconductor, chemical and solar industries. Our instruments are made to a customers’ specification, in whichever style is suitable, for laboratory, industrial systems or OEM installations. Bronkhorst® thermal mass flow meters/controllers are used for accurate, repeatable control of inert gases as well as handling reactive gases, covering flow rates from 0,7 mln/min up to 10.000 m3n/h (Full Scale values). Bronkhorst offers liquid...

Model number identification CEM Series CEM model * depends on liquid and process pressure; table based on water at 1 atmosphere. For other liquids or pressure conditions apply to factory. Operating limits Inlet liquid Outlet mixture W-202A and W-303B Mixing Valve with Heat Exchanger 1/4” Face Seal female 1/4” Face Seal male Optional Separate control valves for mixing gas and liquid. Separate heat exchanger. Dimensions 3-way Mixing Valve and Heat Exchanger Capacities of the 10 Watt CEM-system, models W-101A/W102A Capacities of the 100 Watt CEM-system, model W-202A Dimensions in mm. All...

All-In-One Vapour Delivery Modules – VDM Series VDM Series: Vapour Delivery Modules Based on the CEM-technology as described in the previous section, we designed a series of Vapour Delivery Modules. These compact sub-systems incorporate the components of the CEM-System and more! Besides gas and liquid flow controllers and the temperature controlled evaporator, the VDM Series feature integrated power supply with display (1.8” TFT) and control functions. As an option, the unit offers local or remote trace heating temperature control to prevent condensation of the outgoing vapour flow. The...

Model number identification VDM Series SW Code Heater size Mains power supply 1/4” face seal male Other connection (to be specified) *factory selected internal gas and liquid supply outlets Tracing control Additional tracing control Factory selected (standard) Purge outlet Gas and liquid supply External communication Carrier gas and liquid flow supply Dual carrier gas and liquid flow supply Carrier gas, liquid flow and dilution gas supply Other communication (to be specified) Dual carrier gas, liquis flow and dilution gas supply Technical specifications Other connection (to be specified)...

Module configurations The VDM-Series Modules are greatly standardised. Bronkhorst offers the following configuration options: Single carrier gas supply, no dilution (standard) Dual carrier gas supply, no dilution Single carrier gas supply with dilution Dual carrier gas with dilution Thermal or Coriolis Mass Flow Meter for liquid flow control Single carrier gas supply, no dilution, thermal liquid flow meter. Single carrier gas supply with dilution, thermal liquid flow meter Illustration showing the internal mounting position of the liquid flow meter and the MFC for the carrier gas Dual...

Defined Humidification of Gases Through the combination of Mass Flow Controllers for liquids and the CEM system, gas phase concentrations can be produced as desired. Thus Mass Spectrometers or Gas Chromatographs can be calibrated as the reference stream from the CEM is both highly reproducible and highly accurate due to the direct action of the Mass Flow Controllers. Liquid source Vapour flow Example of a Direct Liquid Injection (DLI) System for ALD Processes Inlet III Carrier gas + precursor III Inlet II Carrier gas + precursor Inlet I Schematic representation of an ALD process Humidified...

Bronkhorst High-Tech designs and manufactures innovative instruments and subsystems for low-flow measurement and control for use in laboratories, machinery and industry. Driven by a strong sense of sustainability and with many years of experience, we offer an extensive range of (mass) flow meters and controllers for gases and liquids, based on thermal, Coriolis and ultrasonic measuring principles. Our global sales and service network provides local support in more than 40 countries. Discover Bronkhorst®! Bronkhorst High-Tech B.V. Nijverheidsstraat 1a NL-7261 AK Ruurlo, The Netherlands