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Vacuum & Ultraclean Motion Control

Vacuum & Ultraclean Motion Control

Product catalog summary

Overview: Picomotor actuators are precision devices used in optical and mechanical systems for fine-positioning. They provide better than 30-nm incremental motion, minimal backlash, and can exert a force of 5 lbs (22 N). Known for long-term stability, they hold positions without power and have a tested lifetime of over a billion steps.

Vacuum Compatibility: Two versions are available: "-V" for standard vacuum (10^-6 Torr) and "-UHV" for ultrahigh vacuum (10^-9 Torr). Both use low-outgassing materials, suitable for semiconductor applications, with sulfur-free options available.

Applications: These actuators are used in OEM designs for linear actuation and optical mounts for precision adjustments. Models like 8341-V or 8341-UHV are used for rotation without translation and are compatible with Intelligent Picomotor driver modules.

Specifications: Actuators offer <30-nm resolution, a maximum load of 5 lbs (22 N), and a speed of 1.2 mm/min. They operate within 10–40 °C and survive –40 to 100 °C. Various models offer different travel ranges and vacuum compliance levels.

High-Radiation Applications: Custom versions with Kapton®-coated wire extensions are recommended for high-radiation environments.

Picomotor Actuator Ultra: Designed for clean-critical environments, offering <30-nm resolution over a 3-mm travel range, suitable for VUV/EUV and UHV environments with an outgassing rate of <0.1 ppm.

Closed-Loop Picomotor Actuator: Model 8310-V offers closed-loop control with an integrated rotary encoder and limit switches, providing ±1-µm bi-directional repeatability, compatible with iPico™ network controllers.

Conclusion: Picomotor actuators are versatile and reliable for precision motion control in various environments, including vacuum and high-radiation settings, with seamless integration into complex systems.

Optomechanical Components Overview: The document details ultraclean and vacuum-compatible components for precision applications in semiconductor equipment, minimizing contamination and outgassing.

Specifications: Nickel-plated mounts for UV beamsteering with low outgassing rates (<5 ppm at 85°C over three hours). Vacuum-compatible to 10^-6 Torr, available in top and center mount versions with optic diameters of 1" and thickness options of 6 mm or 1/4" and 8 mm.

Product Models: Models include 9814-6-Ni-K-V and 9817-6-Ni-K-V, priced $285 to $415, covered by U.S. Patent #5,140,470, with a lifetime warranty.

Tiny Mounts: Stainless steel mounts for limited space applications, offering over 2 mm of translation and ±4° of tilt, vacuum-compatible to 10^-6 Torr, available in styles like Tiny Corner and Tiny Gimbal, starting at $250.

OEM Solutions: New Focus offers customized OEM solutions for ultraclean, low outgassing, UV, and critical environments, including precision beam-alignment systems and vacuum-compatible stages.

Additional Information: Related products include mirrors, removable knobs, posts, and pedestals, with 3D models available on the company's website.

Catalog excerpts

Style Picomotor Actuator Ultra Travel Range 0.12" (3 mm) Speed (@ 2-kHz pulse rate) 1.2 mm/min (typical) Maximum Load (axial force) 5lbs (22 N) Minimum Incremental Motion > ֆ <30 nmTorque 2.5 oz-in (0.018 Nm) Lifetime > Ն >200 Million Steps Vacuum Compliance Level 10 > Ɩ9 Torr Outgassing Rate <0.1 ppm > He Leak Rate 5 10 > ז6 SCCM Survival Temperature Range (non-operating) Kapton > Vacuum-Rated Ribbon Cable Ζ40100 ֺC Cable Style Driver Interface Cable > Ɔ OperatingTemperature Range 10to 40аC Connector 1 Style DB9 Female DB9 Female Limit/Home Sensors 1Home, 2 Limit High-Density 15-pin D and 4-pin...

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Style Motorized UltracleanCenter Mount Optic Diameter 1" Nominal Motorized Axes 2 Adjustment Range 0.25" (6.35 mm) Angular Resolution > Ԇ 0.7 rad Optic Thickness > Ն 6mm or 8 mm Clear Aperture (diameter) 0.9" (22.8 mm) Operating Temperature 10Ɩ40 C Wavefront Distortion (@ 633 nm) > <0.025 Ў (8-mm optics) <0.065 ێ (6-mm optics) Vacuum Compliance Level 10 > ۖ6 Torr WireType Teflon-Coated Wire Length 1.75" (44.5 mm) ExternalCable Length(non-vacuum-rated) 7feet (2.1 m) Connector Type (both cables) 4-pin RJ-22 Metric Versions Compatible Model # > Ɔ 8817-6-V or 8817-8-V Price* $1,760 > Since these...

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TinyCornerMount with Retainer Plate Style Tiny Corner Tiny Opti-ClawЙ Mount Tiny Blank Plate Tiny Gimbal Vacuum Compliance Level 10 > 6 Torr 10 > ֖6 Torr 10 > 6 Torr 10 > ֖6 Torr 10 > 6 Torr Optic Diameter 1/2" (12.5 mm) 1/2" (12.5 mm) 0.06֖0.63" (1.015.9 mm) -NA- 1/2" (12.5 mm) Resolution/5ְTurn 347 rad 347 յrad 347 rad 347 յrad 347 rad Translation Range 2mm 2mm 2mm 2mm 2mm Tilt Range ձ4 б4 б4 б4 б4 Metric Versions Compatible Compatible Compatible Add M to Model # Compatible Model # 9876-K-V 9871-K-V 9872-K-V 9873-K-V 9874-K-V Price** $250 $250 $335 $250 $250 Related Products: Mirrors (pages...

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.

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