MOTORIZED LINEAR STAGES 6-Axis Parallel Kinematic Positioning System MOTORIZED ROTATION STAGES • Compact, integrated 6-axis positioner • Light but with High stiffness (particularly in z) • No moving cables • No accumulation of motion errors A Hexapod is a parallel kinematic motion device that provides six degrees of freedom: X, Y, Z, pitch, roll, and yaw. Hexapods are popular and effective solutions to complex motion applications that demand high load capacity and accuracy in up to six independent axes. Yet, they still have the image of being complex and highly priced. Newport is the first company to introduce a Hexapod that is not only affordable but extremely easy to use. The Newport Hexapod is driven by six enhanced versions of industry-proven, high performance DC servo motor driven LTA actuators. The quality of the actuators has obviously a strong impact on the overall motion performance of a Hexapod, but of almost equal importance are the joints connecting the actuators to the base and the moving top plate. Embracing this challenge, our engineers came up with a unique design of special anti-friction coated spherical joints that are not only simple, but also provide significantly higher rigidity than ordinary universal joints. The result is a Newport Hexapod that provides more than five-times higher rigidity and twice the load capacity of other hexapods of similar size. The Newport Hexapod is supplied with a dedicated HXP100-ELEC controller. This controller accurately masters the synchronized transformations from Cartesian input coordinates to the motion of the Hexapod legs. In addition, the HXP100-ELEC also provides advanced features including instrument grade I/O's, hardware based input triggers, event triggers, high-speed on-the-fly data acquisition, fast TCP/IP communication, and integrated TCL programming language for on-board processes. All these features improve accuracy and throughput, making the programmer’s life much easier. A common requirement for many Hexapod motion applications is a virtual pivot point, allowing the user to freely choose the point in space that is the pivot point for all rotations. The Hexapod XPS controller provides this as a standard feature and at Newport, we have taken this a step further. Not only can the Newport Hexapod relocate the pivot point, but through our advanced technology, the entire coordinate system can be relocated. In addition, two user-definable coordinate systems are provided, called Tool (moves with the Hexapod) and Work (stationary coordinate system). Incremental displacements are possible in either one of these systems in user-friendly Cartesian coordinates, and positions can be easily calculated from one system to the other by a function call. These powerful functions provide a completely new way of mastering Hexapod motions without the need for complex external coordinate transformations. The HXP100 is available in a vacuum compatible version. For other configurations with longer travel, higher speeds or larger load capacities available, please contact the Newport applications team. MOTORIZED OPTICAL MOUNTS METROLOGY INSTRUMENTS PARALLEL KINEMATICS MOTORIZED VERTICAL STAGES MOTORIZED ACTUATORS • Dual virtual centers of rotation, set by software • Optics and satellite assembly and testing • AED simulation • Biotechnology, surgery • X-Ray diffraction • Micromachining, micromanipulation As a standard feature, the Hexapod XPS controller allows the user to choose two virtual pivots point in space for all rotations.

TOOL WORK MOTORIZED LINEAR STAGES BASE WORLD Minimum Incremental Motion, Linear (X, Y, Z) Minimum Incremental Motion, Linear (qx, qy, qz) Absolute moves and positions are defined in the work coordinate system. Incremental moves can be done in the tool or in the work coordinate systems. MOTORIZED ROTATION STAGES Unidirectional Repeatability (qx, qy, qz)(2) Maximum Speed (X, Y, Z) Load CapacityCentered Travel ranges are interdependent. The listed values are max. travels per axis when all other axis are in their centered position (Height = 208 mm for Z). 2) Six-axis move MOTORIZED ACTUATORS Ordering...