Closed-loop Actuators

Product catalog summary

Overview
The document outlines the technical specifications and operational guidelines for the Model 8310 closed-loop Picomotor actuator and the Model 8751-CL Intelligent closed-loop Picomotor driver, designed for precise control and position calibration.

Specifications

Model 8310 Actuator: Features include a resolution of less than 30 nm, force exceeding 5 lbs (22 N), and bi-directional repeatability of ±1 µm over a 0.5-inch travel range. It incorporates a rotary encoder and limit switches.
Model 8751-CL Driver: Manages one Model 8310 actuator, supports up to 31 drivers via Ethernet or RS-232, and includes setup software.
Vacuum-Compatible Model 8310-V: Similar to Model 8310 but suitable for vacuum environments up to 10–6 Torr.
Model 8330 Picomotor Actuator Ultra: Offers less than 30 nm resolution over a 3-mm travel range, ideal for VUV/EUV applications.

Operational Modes
The Model 8310 actuator operates in closed-loop mode for maintaining set positions or moving specified distances, supporting position- or velocity-profiled movements.

System Integration
The iPico system integrates multiple Picomotor actuators on the same network. The Model 8751-CL driver connects via RJ-22 and D connectors, controllable from a computer or network controller.

Technical Recommendations
For optimal performance, it is advised to:

Use lubricants like Krytox GPL 205.
Maintain clean interfaces between actuator and load surfaces.
Avoid pushing against soft materials.
Handle screw threads carefully.

Additional Features
3D models, compatibility with various mounts and stages, and options for customized orders are available. The Picomotor actuator Ultra is noted for its low outgassing rate, suitable for high-vacuum environments.

Conclusion
The Model 8310 and its variants provide high precision and stability for demanding applications, with comprehensive integration and control support through the iPico system.

Product Overview
The document also covers the Model 8751-CL and Model 8330, part of New Focus's motion control and Picomotor actuator line, designed for precision motion control.

Specifications

Model 8751-CL: A closed-loop actuator with a maximum pulse rate of up to 2 kHz, operating on 12-32 VDC input voltage, interfacing via RS-485, with typical power consumption of 17 Watts, and CE compliance. Dimensions are 5.00×3.50×0.85 inches.
Model 8330: Includes a Kapton® vacuum-rated ribbon cable for connection to a vacuum feedthrough, featuring a DB9 female connector style, compliant with vacuum levels up to 10–9 Torr.

Dimensions and Design
Detailed measurements for actuator components are provided, ensuring compatibility with standard tools and interfaces.

Pricing
The Model 8330 is priced at $418, and the Model 8751-CL at $546, with international prices requiring an additional 10%.

Catalog excerpts

Note 1 3.085"(78.36) 0.25"(6.4) 0.795"(12.57) 0.375"(9.50) 0.78" (19.8) min to1.28" max travel 0.24" (6.1)min thickness formounting plate R0.094" (2.38) 440C ball mountingsurface retaining nut 0.34" (8.7)max thickness formounting plate0.09" (2.4) additional clearancefor twisted pair exiting unit 1.150"(29.21)0.67" (17.02) Cables shown are 19" long with a PEEK 15 PIN miniature Sub-D Connector. Sensor wire is a 11 Conductor Teflon Ribbon Cable and Picomotor wire is a shielded 2 wire twisted pair.1. >

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Style Picomotor Actuator Ultra Travel Range 0.12" (3 mm) Speed (@ 2-kHz pulse rate) 1.2 mm/min (typical) Maximum Load (axial force) 5lbs (22 N) Minimum Incremental Motion > ׆ <30 nmTorque 2.5 oz-in (0.018 Nm) Lifetime > Ն 2 Ɨ 10 > 8 Steps Vacuum Compliance Level 10 > 9 Torr Outgassing Rate <0.1 ppm He Leak Rate 5 ֗ 10 > 6 SCCM Survival Temperature Range (non-operating) ֖40100 ֺC OperatingTemperature Range 10to 40аC Limit/Home Sensors 1Home, 2 Limit Dust/Particulates Generation None Mounting/Interface 0.5" (12.7 mm) Shank Connector Type DB9 Male, Cables Not Included Model # 8330 Price* $2,640...

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.

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