AIS - Active Isolation System
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ComPASS PRO Waferinspection machine Active electro-pneumatic vibration isolation providing control in six degrees of freedom.Optimal vibration isolation performance without any amplification at resonance.Excellent level accuracy in both the vertical and horizontal plane.Minimal deflection and settling time after an acceleration or deceleration of a movingmass within the machine, shorter settling times equals greater machine throughput.Very efficient realtime control.PLC, CAN-Bus, one Controller and one High Speed electro-pneumatic servovalve for eachdegree of freedom.Each Controller consists of a microprocessor and integrated, high resolution sensors forposition, air-pressure and acceleration.Easy-to-use, intelligent WinSNI-Software for setting up and optimizing the AIS and forproviding system diagnostics.Two different modes of operation can be selected simply using a digital I/O. For example,scanning mode (during sensitive machine operations) to loading mode (during moving mass within the machine).Feedforward-signal is not required from the machine controller.No disturbing heat generation, magnetic variations or high electrical power consumptionas by electromagnetic actuators / linear motors. > Optimal vibration isolation performance for machines with high dynamic forces that are performing sensitive measurements and inspections, lithography equipment,laser machines, high resolution electron microscopes and machinery for thesemiconductor industry. The AISٙ is utilized when the efficiency of isolation and the settling time ofconventional air-springs with electro-pneumatic leveling systems is insufficient.One function is to protect the precision machine from floor vibration. The otherprimary function is to improve the performance of the machine by minimizing structure borne vibration created by the high dynamic forces produced during anacceleration or deceleration of a moving mass within the machine. In addition,settling time is reduced which minimizes the delay time before the machine can start performing its sensitive operation. > Lab table with active isolation Flat Panel Machine Microprocessor Acceleration sensor(resolution 8 g)RS232 Diagnosis andUpdatesSensor for position(resolution 0,2 > BILZ-Testfields m)Air-pressure sensor(resolution 0,2 mbar)CAN Bus (1MBaud)Servovalve MPYE >

RS232PLCPC WinSNI FED50CAN-Bus I/O > Machine controller Controller Valve The AISٙ consists of a PLC, CAN-Bus, 16 bit-Controllers, HighSpeed electropneumatic servovalves and BiAir air springs and/or HAB horizontal air springs. A range of sizes are available for both the vertical and horizontal air springs. One 16 bit- controller and one High Speed electro-pneumatic servovalveis used for each air spring or group of air springs. The AISworks with a minimum of 3 groups (degrees of freedom) to a maximum of 6 groups (degrees of freedom). The 16 bit- controller can be mounted directly to the...

m/sec12,5 812 m/sec406 m/sec6,25 m/sec203 m/sec3.12 Workshop (ISO)Office (ISO) Residential day (ISO)Operating Theater(ISO) m/sec m/sec1.56 m/sec VC - AVC - BVC - C VC - D VC - E VC - F > rms Velocity, m/s 1 Hz10Hz100Hz1/3 octave bandwidth frequency >

A. Base platformB. Platform for integration in raised-/ cleanroom floor > Our years of experience in the field of vibration isolationcombined with our broad range of standard products guarantee the best technical and cost-effective solution. 1. Vibration Analysis To optimize the design layout and achieve the best isolation results BILZ starts by conducting an on-site vibration analysis. BILZ uses high-end FFT-Analyzers along with the best seismicacceleration sensors and geophones on the market. 2. Engineering and Design Complementing our broad range of products, BILZ offers customized...

D. Platform for minimum working height and very low center of gravityC. Platform for minimum workingheight and low center of gravity Field of application In many leading-edge industries the equipment and process requirements are becoming more demanding. Sub-micron, nano or even angstrom resolution is becoming a common customer requirement. Due to facility and on-site conditions, e.g. floor vibration, these resolutions are very hard to reach. High-endmicroscopes, metrology, inspection and repair equipment as wellas other sensitive tools in the semiconductor industry, micro- biology and...

Tasks The measurement-technological coverage of oscillation emissions e.g. immissions as a basis for vibration technological measurement to observe legally laid down limit values (see graph 1). As canbe seen from graph 2, different limit values must be observed, depending on the location of the machine. This standard aims at laying down principles according to which mechanical shocks can be measured in buildings, enabling the determination of effects of vibrations on human beings and building construction.Another relevant example for the necessity of a vibration analysis isthe mounting of...