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Esec 2100 hSi / sDadvancedi

Esec 2100 hSi / sDadvancedi

Esec 2100 hSi / sDadvancedi

Product catalog summary
Overview
The document provides a detailed description of the Esec 2100 i Die Bonder family, highlighting its advanced features and capabilities in semiconductor manufacturing. The focus is on automation, precision, and productivity enhancements.

Specifications
  • Bond Force: 0.2 - 50 N for Esec 2100 sD advancedi; 0.2 - 20 N for Esec 2100 hSi.
  • Bond Rotation: 0 - 360°.
  • Heating: Programmable, max. 200 °C.
  • Wafer Frame Size: 6” - 12”.
  • Die Size: 0.15 - 20 mm.
  • Die Thickness: > 0.015 mm for sD; > 0.075 mm for hSi.
  • Footprint: 1785 x 1448 x 1400 mm.
  • Weight: Approx. 1600 kg for sD; 1400 kg for hSi.

Key Features
  • Bond Height Measurement System: Inspects die tilt, bond line thickness, and filet height directly at the bond position.
  • Dual Dispensing Module: Offers dispense volume control for enhanced productivity.
  • Automated Tool Optimization: Reduces operator dependency and enhances precision.
  • High Precision Bond Head: Ensures ultra-precise bonding with a device height sensor.
  • High Resolution Vision Systems: Includes up-looking vision and low contrast detection capabilities.

Process Inspection and Control
  • Features a full high-definition graphical user interface with multiple camera inspection images.
  • Includes machine self-diagnostics and automatic illumination detection.

Performance Metrics
  • Die Placement Accuracy (DAF): Varies by mode, with accuracy mode achieving 10 μm / 0.15°.
  • Die Placement Accuracy (Epoxy): Varies by mode, with accuracy mode achieving 12 μm / 0.2°.
  • MTBF: Greater than 200 hours.

Conclusion
The Esec 2100 i Die Bonder family represents a significant advancement in die bonding technology, offering unparalleled precision, automation, and productivity for semiconductor manufacturing.
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Catalog excerpts

Esec 2100 hSi / sDadvancedi-1

Esec 2100 hSi / sD advanced i Package 2 Refining the Intelligent Die Bonders Future Proof Equipment The Esec 2100  i Die Bonder family is further enhanced with the new Bond Height Measurement System to inspect Die Tilt, Bond Line Thickness and Filet Height directly at the Bond Position. Automated Bond Head Tilt Adjusting as well as Dispense and Bond Tool Auto-optimizing bring automation to the next level. Unmatched Process Accuracy is assured with the Device Height Sensor, High Precision Bond Head and High Resolution Vision Systems which include Up Looking Systems. And not to be missed is the Dual Dispensing Module with its unbeatable productivity. Versatile, Accurate, Productive, Automated • On spot Die Tilt, Bond Line and Filet Height Measurement • Dual Dispensing Module with Dispense Volume Control • Automated Tool Optimization to eliminate operator dependency • Ultra precise bonding with Device Height Sensor and High Precision Bond Head • High Resolution Vision System including Up Looking Vision and Low Contrast Kit to detect almost anything INTELLIGENCE IN PROCESS CONTROL INTELLIGENCE IN PROCESS INSPECTION INTELLIGENCE IN PRODUCTIVITY INTELLIGENCE IN

 Open the catalog to page 1
Esec 2100 hSi / sDadvancedi-2

www.besi.com - [email protected] • Dual Dispensing Module with independent writing axes • Dual 5 bar Pneumatic Dispense System Controller • Superior and proven “light & rigid” P&P design • High Performance P&P Y-axis with Liquid Cooling System • High Performance 4th Generation Vision System • High Speed Production Mode with excellent accuracy • Device Height Sensor for extreme Z-Height Control • High Precision Bond Head with highly accurate Theta-axis • High accuracy closed loop P&P Z-axis • High Resolution 4 Megapixel Vision Systems • New High Resolution Up Looking Vision System • High Accuracy...

 Open the catalog to page 2
*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.