9800 TC next

9800 TC next

9800 TC next

Product catalog summary
Overview
The 9800 TC next is an advanced thermo compression bonding system designed for next-generation chiplet and interposer packages. It is engineered to meet the stringent requirements of modern advanced packaging with enhanced performance indicators.
Key Features
  • Advanced Micro-Inert Chamber: Optimized for minimal gas consumption, ensuring efficient operation and cost savings.
  • Accuracy and Stability: Provides precise bonding with long-term stability, suitable for bump pitch scaling.
  • Bonding Capabilities: Delivers forces up to 500 N, with an optional upgrade to 1 kN.
  • Vision Systems: High-resolution systems ensure precise alignment and inspection.
  • Thin Die Capability: Handles thin dies, expanding application possibilities.
  • Process Control: Advanced monitoring functions for superior control over the bonding process.
  • Material Feeding System: Configurable for customized material handling.
Material Handling
  • Substrate Wafer: Supports up to 12” wafers from FOUP and quarter panels.
  • Component Supply: Automatic tray handling and T&R cart capabilities.
  • Die Transfer: Supports non-flip and flip die transfer.
Thermal Capabilities
  • Substrate Wafer Temperature: 250°C ± 5°C over 300 mm.
  • Bond Head Temperature: 450°C with a roadmap to 500°C.
  • Heating and Cooling Rates: >200°C/sec heating and >75°C/sec cooling.
Precision and Control
  • Accuracy: X & Y accuracy of 0.5 µm and theta accuracy of 1 mdeg.
  • Bond Force: Ranges from -15 N to 500 N, with precision control.
  • Tilt Control: Less than 1 µm.
Additional Features
  • Inert Environment: N2 micro chamber with optional flux exhaust.
  • Cleanroom Class: ISO 5 / Class 100.
  • Software & Automation: Includes bond traces, inline process monitoring, and full factory automation for Industry 4.0.
Specifications
  • Footprint: 6.08 m², configuration dependent.
  • Weight: Approximately 7.8 tons.
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Catalog excerpts

9800 TC next-1

9800 TC next Next-gen die attach for chiplet & interposer packages The 9800 TC next is the latest innovation in thermo compression bonding, designed to meet the evolving trends and stringent requirements of advanced packaging. Engineered for excellence, this system features significantly enhanced key performance indicators, ensuring superior results in every application. Future Proof Equipment Key Highlights • Advanced Micro-Inert Chamber: Optimized for minimal gas consumption, this critical assembly ensures efficient operation and cost savings. • Unmatched Accuracy and Stability: Achieve precise bonding with long-term stability, perfect for advancing bump pitch scaling plans. • Powerful Bonding Capabilities: The 9800 TC next delivers bonding forces up to 500 N, with an optional upgrade to 1 kN, accommodating a variety of bonding needs. • High-Resolution Vision Systems: Ensures precise alignment and inspection, crucial for maintaining high quality standards. • Thin Die Capability: Expertly handles thin dies, expanding your application possibilities. • Superior Process Control: Advanced monitoring functions provide unparalleled control over the bonding process. • Configurable Material Feeding System: Offers incredible flexibility, allowing for customized material handling to suit diverse requirements. The 9800 TC next supports a wide range of applications, providing the versatility and performance you need to stay ahead in the rapidly evolving landscape of advanced packaging. Discover the future of thermo compression bonding now, with the 9800 TC next.

 Open the catalog to page 1
9800 TC next-2

www.besi.com - [email protected] Material handling Substrate wafer (through EFEM) Up to 12” wafer from FOUP (3 x FOUP ports) & quarter panel (300 x 300 mm) Substrate wafer thickness Component supply Tray (Jedec) handling Automatic Tray handling via FOUP T&R cart capacity (roadmap) Wafer handling (roadmap) P&P from taped wafer, waffle pack, gel pack, etc. (up to 15" frames) via FOUP Thermal capabilities @35 mm heater size (70 mm heater size roadmap)** Substrate wafer temperature Bond head temperature Bond head heating rate Bond head cooling rate Bond head thermal control & uniformity static thermal...

 Open the catalog to page 2
*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.