Model SE106 Sensor Dies for Flow Meter Application Description The SE106 is a piezoresistive sensor die especially designed for flow meter applications. Hence this model is able to measure differential pressure, static (line or system) pressure, and temperature of pipeline at the same time. In order to measure two kinds of pressures simultaneously, the SE106 consists of two silicon diaphragms, one for differential pressure measurement and the other for static pressure measurement. Its temperature measurement is achieved by using the on-chip thermistor. The SE106 is available in silicon-on-glass structure with the dimensions of 3.45mm x 4.05mm x 1.4mm. The glass constraint is inevitable for this model. Before packaging, each SE106 sensor die is tested and inspected. Features static pressure, differential pressure, and temperature measurements at the same time for P1 measurement (P1: static pressure) differential pressure ranges up to 10bar vacuum cavity for either voltage or current excitation glass constraint flow meter instrumentation cross-section process control Circuit Diagrams excitation+ excitation+ thermistor circuit diagram for temperature measurement bridge circuit diagram of differential pressure measurement bridge circuit diagram of static pressure measurement BCM SENSOR TECHNOLOGIES BVBA Industriepark Zone 4, Brechtsebaan 2 website: www.bcmsensor.com B-2900 Schoten - Antwerpen, BELGIUM email: [email protected]

Model SE106 Sensor Dies for Flow Meter Application Technical Data Parameter differential pressure (ΔP) ranges Units barD static pressure (P1) overload pressure limit full scale output (fsO) zero offset output of temperature measurement excitation accuracy of temperature measurement long-term stability bridge resistance temperature sensor static pressure effect to differential pressure operating temperature range storage temperature range temperature measuring range temp. coeff. (TC) of bridge resistance voltage excitation current excitation TC of zero offset TC of SPAN thermal HY of zero offset...

Model SE106 Sensor Dies for Flow Meter Application Ordering Information differential pressure ranges 10 = 0~10 bar D D customized range D available as an option D static pressure ranges A customized range A available as an option A non-linearity (NL) 0.25%fs (standard) 0.5%fs temperature sensor R25 = 25 ±5 kΩ (standard) customized resistance available as an option package X = individual dice in 2" plastic package (standard) Y = 4" diced wafers on blue tape Z = 4" non-diced wafers on blue tape “(*)” is necessary only if any customized parameter is required, otherwise it is neglectable. Examples...