Model SE102 High-Overload-Pressure Sensor Dies Description The model SE102 is a pressure sensor die of high overload pressure (HOP), i.e., high proof pressure and high burst pressure, which is based on piezoresistive working principle. It is designed for absolute, gauge or differential pressure measurements. The HOP sensor die is manufactured by the 6" silicone micro-machining process, and it features silicon-onsilicon structure. Thanks to the unique design of its pressure diaphragm, the SE102 possesses both high sensitivity and extraordinary overload pressures. As a non-signal-conditioning sensor die, the standard SE102 is available in an open-bridge circuit with five solder pads for both bridge adjustment and temperature compensation. Before packing, each SE102 sensor die is individually tested and qualified to its specifications. Three types of packaging are available as options to fit different marketing demands. Features excellent non-linearity up to: ±0.15%fs designed for absolute, gauge or differential pressure applications small foot-print, high product rate per wafer for low cost application high sensitivity and extraordinary proof and burst pressure medical: clinical devices and patient monitoring systems (e.g. dialysis instruments) automotive: tire pressure monitoring, engine control, and suspension adjustment system consumer: consumer electronics, barometers (or altimeters), and depth gauges (e.g., diving watches) automation: mass production of pressure sensors, pressure switches, and pressure controllers Wheatstone Bridge Circuit Diagram excitation+ excitationopen-bridge circuit diagram (standard) closed-bridge circuit diagram (available as on request for mass production) BCM SENSOR TECHNOLOGIES BVBA Industriepark Zone 4, Brechtsebaan 2 website: www.bcmsensor.com B-2900 Schoten - Antwerpen, BELGIUM email: [email protected]

Model SE102 High-Overload-Pressure Sensor Dies Lateral Dimensions and Terminal Pads Layout silicon membrane pressure cavity silicon membrane vacuum cavity silicon constraint silicon constraint silicon constraint with vent for gauge and differential pressure measurements silicon constraint without vent for absolute pressure measurements BCM SENSOR TECHNOLOGIES BVBA Industriepark Zone 4, Brechtsebaan 2 website: www.bcmsensor.com B-2900 Schoten - Antwerpen, BELGIUM email: [email protected]

Model SE102 High-Overload-Pressure Sensor Dies Technical Data Parameters pressure ranges & reference proof pressure burst pressure full scale output (fso) 5 (typical), or any voltage in the range of 1, ..., 10Vdc 1 (typical), or any current in the range of 0.2, ..., 2mA zero offset long-term stability bridge resistance storage temperature range operating temperature range temp. coeff. (TC) of bridge resistance thermal HY of zero offset General conditions for measurements: temperature = 25°C, humidity = 40%RH. Notes: 1. Customized pressure ranges available on request. Consult BCM SENSOR. 2. fs...

High-Overload-Pressure Sensor Dies_SENSOR Ordering Information Examples of Ordering Code • standard sensor die: model-pressure range-NL-package BCM SENSOR TECHNOLOGIES BVBA Industriepark Zone 4, Brechtsebaan 2 Tel.: +32-3-238 6469 website: www.bcmsensor.com B-2900 Schoten - Antwerpen, BELGIUM Fax: +32-3-238 4171 email: [email protected]