Model SE101 Small-Size Absolute Pressure Sensor Dies Description Dimensions P silicon diaphragm The model SE101 sensor die is designed for automotive application, and is operated on the piezoresistive effect. Manufactured by the 6" silicone micro-machining process, this sensor die has silicon-on-silicon structure with dimensions of 1mm x 1mm x 0.3mm. Due to its unique design of the pressure diaphragm, the SE101 possesses not only high sensitivity but also extraordinary overload pressure (proof pressure and burst pressure). As a non-singal-conditioning sensor die, the SE101 is available in an open-bridge circuit with 5 solder pads for both bridge adjustment and temperature compensation. Before packing, each SE101 sensor die is individually tested and qualified to its specifications. 3 different types of packaging are available as options to fit different marketing demands. 1 terminal pads layout Note: All dimensions are in mm. Features excellent non-linearity up to: ±0.25%fs (typical: ±0.15%fs) designed for gauge or differential pressure applications small foot-print, high product rate per wafer for low cost application high sensitivity and extraordinary overload pressure Applications medical: clinical devices and patient monitoring systems (e.g. dialysis instruments) automotive: tire pressure monitoring, engine control, and suspension control consumer: consumer electronics, barometers (or altimeters), and depth gauges (e.g., diving watches) automation: mass production of pressure sensors, pressure switches, and pressure controllers BCM SENSOR TECHNOLOGIES BVBA Industriepark Zone 4, Brechtsebaan 2 website: www.bcmsensor.com B-2900 Schoten - Antwerpen, BELGIUM email: [email protected]

Model SE101 Small-Size Absolute Pressure Sensor Dies Wheatstone Bridge Circuit Diagram excitation+ excitationopen-bridge circuit diagram (standard) Technical Data Parameters pressure ranges & reference proof pressure burst pressure full scale output (fso) 5 (typical), or any voltage in the range of 1, ..., 10Vdc 1 (typical), or any current in the range of 0.2, ..., 2mA zero offset long-term stability bridge resistance storage temperature range operating temperature range temp. coeff. (TC) of bridge resistance thermal HY of zero offset General conditions for measurements: temperature = 25°C, humidity...

Small-Size Absolute Pressure Sensor Dies Ordering Information Examples of Ordering Code • standard sensor die: model-pressure range-NL-package BCM SENSOR TECHNOLOGIES BVBA Industriepark Zone 4, Brechtsebaan 2 Tel.: +32-3-238 6469 website: www.bcmsensor.com B-2900 Schoten - Antwerpen, BELGIUM Fax: +32-3-238 4171 email: [email protected]