Description Dimensions Model FD101 is a piezoresistive force sensor die, which is made from monocrystalline silicon and specially designed for multi-axial force measurement or sensor application to measure extreme low-level forces. It is manufactured through MEMS process and therefore features small size (1.3mm x 1.3mm) and capacity of high volume per batch in mass production. This model FD101 force sensor die has its four piezoresistive resistors each laid perpendicularly to the adjacent ones, similar pattern to the EB-type of metal foil strain gauges from BCM SENSOR. As a result, this force sensor die can be used to measure a force in all directions. The four piezoresistive resistors of the FD101 force sensor die constitute a full-bridge circuit, resulting in a high sensitivity for low-level force measurement down to a few microstrains. On the FD101, its Wheatstone bridge circuit is configured to the open-bridge circuit of 5 solder pads, on which gold leads can be attached on request. 5 solder pads also bring advantage to facilitation of its zero-offset adjustment and temperature compensation. As there is no signal-conditioning circuitry on this sensor die, its output signal is directly from its Wheatstone bridge circuit. Three different packaging methods (X, Y, and Z) can be used and are available to package the FD101 sensor dies in order to fit to different application demands. Before packing, each FD101 sensor die is individually tested and qualified to its specifications. Features • excellent non-linearity up to: ±0.5%fs • high output sensitivity: ^ 25mV/V • small foot-print, high product rate per wafer for cost-effective application • gold leads on solder pads available on request Applications • automation: mass production of force sensors, force switches, and force controllers • medical: clinical devices and patient monitoring systems (e.g. dialysis instruments) • stress analysis: stress, strain, and vibration monitoring • consumer: consumer electronics BCM SENSOR TECHNOLOGIES BVBA Industriepark Zone 4, Brechtsebaan 2 B-2900 Schoten - Antwerpen, BELGIUM website: www.bcmsensor.com email: [email protected]

SENSOR Wheatstone Bridge Circuit Diagram Technical Data Parameters General conditions for measurements: temperature = 25°C, humidity = 40%RH. Notes: 1. fs refers to full scale strain. 2. Measured at nominal strain of 500je with orientation laterally along any of the resistor of the sensor die. 4. Calculated according to Terminal Base Line (the endpoint method). 5. Calculated as a rate of resistance change between -55°C and +75°C, and normalized by the resistance at 25°C. 6. Calculated as a rate of output change between -55°C and +75°C, and normalized by the output at 25°C, when the die is not...

SENSOR Ordering Information Iposition (pos.) 1: model FD101 |pos. 2: nominal strain 500 = 500je pos. 3: output signal 125mV Ipos. 4: non-linearity 0.5%fs pos. 5: bridge type OB = open-bridge circuit pos. 6: package X = individually packaged die in plastic package (standard for sample order) Y = diced wafer on tape (standard for volume order) Z = non-diced wafer Examples of Ordering Code standard sensor die: FD101-500-125mV-0.5%fs-OB-Y The listed dimensions, specifications and ordering information are subject to change without prior notice. Industriepark Zone 4, Brechtsebaan 2 B-2900 Schoten -...