450mm Ceramic Heater Design and assembly
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Catalog excerpts

450mm Ceramic Heater Design and assembly - 1

450mm Ceramic Heater Design and assembly Bottom view on the heater assembly with section Cables routed to center, can be connected to feedthrough Optional Isolation Plate beneath heater segments (Zirconia, Cordierrite, Zerodur, etc. Silicon Carbide Top Plate Ø450mm or Ø480mm (can also be Aluminum Nitride) Silicon Nitride heater segments (bolted to SiC plate)

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450mm Ceramic Heater Design and assembly - 2

Zone layout – 14 separately controlled zones Center heater with 5 concentric conductor circles – 3 for center zone and 2 for edge zone, power ratio between zones 1:1 Edge heater segments with large inner heating zone and separate conductor for the outer edge

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