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CMS Series Gas Mass Flow Meter

CMS Series Gas Mass Flow Meter
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• GAS FLOW MEASUREMENT AND CONTROL PRODUCTS* The CMS is a highly reliable gas mass flowmeter that uses the Yamatake uF (Micro Flow) sensor as its sensing element. The uF sensor is a MEMS thermal mass-flow sensor capable of measuring ultra-low flow rates. The integration of the uF sensor and advanced channel design technology has achieved high accuracy and high rangeability at a low cost. • Gas Type and Maximum Control Flow Rate The maximum control flow rate varies according to the gas type

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GAS FLOW MEASUREMENT AND CONTROL PRODUCTS Selection Guide Segment I II I II III IV V VI VII VIII IX X XI XII Model No. selection Basic No. Flow rate range CMS ↓ ↓ ↓ ↓ ↓ ↓ 9500 – O – O – O 0002 – O – O – O 0005 – O – O – O Accessories (sold separately) Example: CMS0020BPRN000000 Part No. Description ↓ ↓ ↓ Gas mass flow meter – O – 0 to 500mL/min (standard) – O – 0 to 2L/min (standard) – O – 0 to 5L/min (standard) Display B IV Material P S T V Connection R U T S V VI Gas type N S VII Output 0 VIII Option 1 0 2 1 IX Option 2 0 X Option 3 0 XI Option 4 Harness for RS-485 communications (5m...

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