WET process sensors
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azbilWET PROCESS SENSORS/SWITCHES/FIBERS/FLOWMETERS SELECTION GUIDE f \ Please read “Terms and Conditions” from the following URL before ordering and use. https://www.azbil.com/products/factory/order.html v_._j__ Other product names, model numbers and company names may be trademarks of the respective company. [Notice] Specifications are subject to change without notice. No part of this publication may be reproduced or duplicated without the prior written permission of Azbil Corporation. Azbil Corporation Advanced Automation Company Yamatake Corporation changed its name to Azbil Corporation on April 1, 2012. 1-12-2 Kawana, Fujisawa Kanagawa 251-8522 Japan URL: https://www.azbil.com 1st Edition: Apr. 2003-ST 9th Edition: Oct. 2019-ED (15) Liquid detection in the semiconductor and * FPD manufacturing processes

Liquid detection sensors & switches for semiconductor and FPD manufac turing/Flowmeters Sensor Selection by Process and Equipment Equipment examples -Coater /developer - Stepper Resist solution level detection Space-saving, gang-mountable Pipe-mounted liquid level switches with built-in amplifier Model HPQ-T_ Liquid leak switches with built-in amplifier Model HPQ-D2_ Liquid detection and measurement sensors & switches play key roles in a variety of equipment and processes. Resist solution leak detection Secure installation in tight spaces Equipment examples - Chillers - Scrubbers - VMBs...

Sensor Selection by Chemical and Application INDEX Selection by Equipment & Process P. 01 by Chemical & Application P. 03 Liquid detection and measurement sensors & switches for a variety of chemicals and uses Acid/alkali chemicals IPA etc. organic solvents Resist solution Circulation fluid/ pure water/water Liquid Leak Detection p 11- Liquid leak switches with built-in amplifier Model HPQ-D1 Liquid leak detection fiber-optic sensor Model HPF-D040 Liquid leak switches with built-in amplifier Model HPQ-D2 Liquid leak switches with built-in amplifier Model HPQ-DP11/HPQ-DP12 P. 15 Liquid Level...

CLEANING IPA liquid level detection Equipment examples Chemical temperature measurement Upper limit detection abnormality Required optical system or Dark if liquid present Lower limit detection Required optical system Light circuit closed when liquid present: IPA liquid level detection Dark if liquid absent 16 light axes cancel the influence of water droplets and air bubbles, and achieve stable detection. Light circuit closed when no liquid: - Single wafer cleaning system - Batch type cleaning machine - Etcher Pipe-mounted fiber-optic liquid-level sensor Model HPF-T032E /HPF-T034E Fail-safe...

Slurry/diluted chemical liquid level detection Slurry/diluted chemical liquid level detection Pipe-mounted fiber-optic liquid level sensors Model HPF-T034E Suitable for detection of cloudy liquids such as slurry Regardless of whether the target liquid is cloudy or transparent, light refracts in the same way, so there is no reversal of the sensor’s operation. As a result, the same settings can be used for level detection of the slurry and of washing water. - No liquid (initial state) Diluent flow rate measurement Light receiver Light blocked Light emitter Light receiver Light emitter Light...

HEAT TREATMENT Detection of chiller circulation fluid level - Chillers - Scrubbers - VMBs Refractive detection ensures sufficient gain between light-ON and dark-ON light levels. This switch is also suitable for liquids with poor light transmission (such as resist liquid and waste fluids). Operation panel located on the side Circulation fluid level Equipment examples Pipe-mounted liquid level switches with built-in amplifier Model HPQ-T_ Easy liquid level detection without tuning With the indicator and operation selector switch located on the side, even when switches are gang-mounted, it is...

Liquid Leak Detection Liquid leak detectors with built-in amplifier CATALOG LISTING ACCESSORY Model HPQ-D1 /HPQ-D2 Optical type Built-in amplifier, no absorbent paper required, usable with various liquids. Detection method & shape Notes: • For Model HPQ-D11/12/21 models, a switch with 5m cable (2m PFA tube) is also available, specially produced for the U.S. market (-L05). • Normally open type: no UL certification. • For product details, contact one of our sales representatives or an Azbil dealer. Mounting base material PFA protection Case Cable Acids or alkaline liquids, IPA (isopropyl...

Liquid Leak Detection Liquid leak detectors with built-in amplifierModel HPQ-DP11/HPQ-DP12 ^ CATALOG LISTING Built-in amplifier, no absorbent paper required, usable with various liquids. Detection method & shape Note: Model with 5 m cable is also available. SPECIFICATIONS For pure water, industrial water, Fluorinert, Galden, etc. Notes: For explosion-proof applications, be sure to select a suitable fiber type. Fluorinert™ is a registered trademark of 3M and Galden™ is a registered trademark of Solvay Solexis. Optical method detects liquid leakage directly Detection is possible immediately...

Products Liquid Leak Detection Liquid leak detection fiber-optic sensors Model HPF-D040 Inherently safe product. PFA protects sensor and cable Saves space. CATALOG LISTING Diffuse scan Shape (mm) Bend radius Catalog listing Inherently PFA protection R20 5m Operating temperature safe product Case Cable Free Cut -30 to +70X PFA protects sensor and cable, Usable in an atmosphere with organic solvents such as IPA. Notes: SUS is partially used on the mounting bracket. Saves space Sensor head has a height of only 9.9 mm. Catalog listing Note: Use of sensor in explosive atmosphere The fiber unit...

17 Products Level Detection Tank-inserted fiber-optic sensors All-resin structure ensures no metal contamination. - 4mm diameter allows easy running of cables. - Reliable detection by preventing liquid cling! Reliable detection by preventing liquid cling! Proprietary tip structure prevents liquid from clinging to the tip, eliminating a cause of faulty operation. Fiber optic cable Lens Molded prism tip CATALOG LISTING Diffuse scan Type Shape Bend radius DETECTION PRINCIPLE Recommended compatible amplifier unit Auto sensitivity switch function This function automatically optimizes the...