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Azbil Europe NV
WET process sensors

WET process sensors

Product catalog summary

Introduction
This document is a guide for selecting liquid detection sensors and switches used in semiconductor and flat panel display manufacturing. It includes models for wet processes, covering sensors, switches, fibers, and flowmeters.

Specifications and Models
The document details models for specific applications:

Liquid Leak Detection: Models HPQ-DP11/HPQ-DP12 and HPQ-D1_/HPQ-D2_ detect leaks in various liquids with built-in amplifiers for accuracy.
Liquid Level Detection: Models HPF-T032E/HPF-T034E and HPF-D027/HPF-D033 are fiber-optic sensors for detecting liquid levels in tanks and pipes.
Temperature Measurement: Model YYQZ01 is a chemical-resistant temperature sensor.
Flow Rate Measurement: Model F7M is a micro flow rate liquid flow meter for corrosive fluids.

Applications
Sensors and switches are used in:

Chillers: For fluid level and leak detection.
Scrubbers: For liquid level and temperature measurement.
CMP: For slurry and chemical liquid level detection.
Cleaning Systems: For wafer and batch cleaning machines.

Key Features

Built-in amplifiers for enhanced detection accuracy.
Fiber-optic sensors avoid metallic contamination.
Temperature sensors withstand harsh environments.
Flow meters use thermal measurement for precise monitoring.

Conclusion
The guide provides an overview of Azbil Corporation's liquid detection solutions, emphasizing adaptability to various processes and environments.

Overview
The document provides specifications and guidelines for liquid leak detection products, including fiber-optic sensors and liquid level detection systems, with features like explosion-proof options and easy maintenance.

Specifications
Specifications for models include:

Detection methods: Retroreflective and optical.
Materials: PFA, PVC, stainless steel.
Operating temperature: -30°C to +105°C.
Output modes: Open collector NPN/PNP.
Protection: IP67 rating.

Procedures
Installation and operation procedures emphasize selecting the correct fiber type for explosion-proof applications and sensitivity adjustments based on liquid properties.

Standards and Certifications
Products are CE marked and UL certified, ensuring compliance with international standards.

Recommendations
Advice on selecting models based on environmental conditions and application needs, with recommendations for regular maintenance.

Key Features

Fail-safe operation in case of fiber breakage.
Easy maintenance compared to traditional methods.
Versatility for various liquids.

Conclusion
The document emphasizes the reliability and adaptability of liquid leak detection products for different environments.

Specifications and Features
Flow measurement devices use MEMS technology for micro flow rates, featuring a straight flow path for reduced pressure loss and easier cleaning.

Installation and Handling Procedures
Discusses mounting methods and precautions for various models.

Standards and Compliance
Outlines compliance with international standards like UL and CSA.

Material Compatibility
Lists substances and their compatibility with PFA, noting limitations.

Global Standards and Approvals
Overview of international standards organizations and their roles.

Overview of KOSHA and Safety Marks
1. KOSHA and the S-mark
KOSHA provides safety guidance and the S-mark certifies product safety and reliability.
2. KC Mark and Radio Waves Act
KC mark is required for computers and communication equipment in Korea.
3. CCC Mark and GB Standards
CCC mark ensures uniformity in Chinese standards.
4. European Standards and CE Marking
CE marking ensures compliance with EU safety regulations.
5. VDE and TÜV Standards
VDE and TÜV provide testing and certification for compliance with EN standards.
6. CSA Mark
CSA mark certifies products for Canadian standards.
7. Safety Integrity Level (SIL) and Performance Level (PL)
SIL and PL measure safety function performance in control systems.
8. WHG Certificate
WHG is a German law for water protection, requiring overfill prevention.

Catalog excerpts

azbilWET PROCESS SENSORS/SWITCHES/FIBERS/FLOWMETERS SELECTION GUIDE f \ Please read “Terms and Conditions” from the following URL before ordering and use. https://www.azbil.com/products/factory/order.html v_._j__ Other product names, model numbers and company names may be trademarks of the respective company. [Notice] Specifications are subject to change without notice. No part of this publication may be reproduced or duplicated without the prior written permission of Azbil Corporation. Azbil Corporation Advanced Automation Company Yamatake Corporation changed its name to Azbil Corporation on April 1, 2012. 1-12-2 Kawana, Fujisawa Kanagawa 251-8522 Japan URL: https://www.azbil.com 1st Edition: Apr. 2003-ST 9th Edition: Oct. 2019-ED (15) Liquid detection in the semiconductor and * FPD manufacturing processes

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Liquid detection sensors & switches for semiconductor and FPD manufac turing/Flowmeters Sensor Selection by Process and Equipment Equipment examples -Coater /developer - Stepper Resist solution level detection Space-saving, gang-mountable Pipe-mounted liquid level switches with built-in amplifier Model HPQ-T_ Liquid leak switches with built-in amplifier Model HPQ-D2_ Liquid detection and measurement sensors & switches play key roles in a variety of equipment and processes. Resist solution leak detection Secure installation in tight spaces Equipment examples - Chillers - Scrubbers - VMBs Chiller...

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Sensor Selection by Chemical and Application INDEX Selection by Equipment & Process P. 01 by Chemical & Application P. 03 Liquid detection and measurement sensors & switches for a variety of chemicals and uses Acid/alkali chemicals IPA etc. organic solvents Resist solution Circulation fluid/ pure water/water Liquid Leak Detection p 11- Liquid leak switches with built-in amplifier Model HPQ-D1 Liquid leak detection fiber-optic sensor Model HPF-D040 Liquid leak switches with built-in amplifier Model HPQ-D2 Liquid leak switches with built-in amplifier Model HPQ-DP11/HPQ-DP12 P. 15 Liquid Level Detection...

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CLEANING IPA liquid level detection Equipment examples Chemical temperature measurement Upper limit detection abnormality Required optical system or Dark if liquid present Lower limit detection Required optical system Light circuit closed when liquid present: IPA liquid level detection Dark if liquid absent 16 light axes cancel the influence of water droplets and air bubbles, and achieve stable detection. Light circuit closed when no liquid: - Single wafer cleaning system - Batch type cleaning machine - Etcher Pipe-mounted fiber-optic liquid-level sensor Model HPF-T032E /HPF-T034E Fail-safe detection...

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Slurry/diluted chemical liquid level detection Slurry/diluted chemical liquid level detection Pipe-mounted fiber-optic liquid level sensors Model HPF-T034E Suitable for detection of cloudy liquids such as slurry Regardless of whether the target liquid is cloudy or transparent, light refracts in the same way, so there is no reversal of the sensor’s operation. As a result, the same settings can be used for level detection of the slurry and of washing water. - No liquid (initial state) Diluent flow rate measurement Light receiver Light blocked Light emitter Light receiver Light emitter Light receiver...

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HEAT TREATMENT Detection of chiller circulation fluid level - Chillers - Scrubbers - VMBs Refractive detection ensures sufficient gain between light-ON and dark-ON light levels. This switch is also suitable for liquids with poor light transmission (such as resist liquid and waste fluids). Operation panel located on the side Circulation fluid level Equipment examples Pipe-mounted liquid level switches with built-in amplifier Model HPQ-T_ Easy liquid level detection without tuning With the indicator and operation selector switch located on the side, even when switches are gang-mounted, it is easy...

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Liquid Leak Detection Liquid leak detectors with built-in amplifier CATALOG LISTING ACCESSORY Model HPQ-D1 /HPQ-D2 Optical type Built-in amplifier, no absorbent paper required, usable with various liquids. Detection method & shape Notes: • For Model HPQ-D11/12/21 models, a switch with 5m cable (2m PFA tube) is also available, specially produced for the U.S. market (-L05). • Normally open type: no UL certification. • For product details, contact one of our sales representatives or an Azbil dealer. Mounting base material PFA protection Case Cable Acids or alkaline liquids, IPA (isopropyl alcohol),...

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Liquid Leak Detection Liquid leak detectors with built-in amplifierModel HPQ-DP11/HPQ-DP12 ^ CATALOG LISTING Built-in amplifier, no absorbent paper required, usable with various liquids. Detection method & shape Note: Model with 5 m cable is also available. SPECIFICATIONS For pure water, industrial water, Fluorinert, Galden, etc. Notes: For explosion-proof applications, be sure to select a suitable fiber type. Fluorinert™ is a registered trademark of 3M and Galden™ is a registered trademark of Solvay Solexis. Optical method detects liquid leakage directly Detection is possible immediately after...

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Products Liquid Leak Detection Liquid leak detection fiber-optic sensors Model HPF-D040 Inherently safe product. PFA protects sensor and cable Saves space. CATALOG LISTING Diffuse scan Shape (mm) Bend radius Catalog listing Inherently PFA protection R20 5m Operating temperature safe product Case Cable Free Cut -30 to +70X PFA protects sensor and cable, Usable in an atmosphere with organic solvents such as IPA. Notes: SUS is partially used on the mounting bracket. Saves space Sensor head has a height of only 9.9 mm. Catalog listing Note: Use of sensor in explosive atmosphere The fiber unit can...

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17 Products Level Detection Tank-inserted fiber-optic sensors All-resin structure ensures no metal contamination. - 4mm diameter allows easy running of cables. - Reliable detection by preventing liquid cling! Reliable detection by preventing liquid cling! Proprietary tip structure prevents liquid from clinging to the tip, eliminating a cause of faulty operation. Fiber optic cable Lens Molded prism tip CATALOG LISTING Diffuse scan Type Shape Bend radius DETECTION PRINCIPLE Recommended compatible amplifier unit Auto sensitivity switch function This function automatically optimizes the sensitivity...

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WET process sensors

WET process sensors

Catalog excerpts

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