Application-specific sensors High-power detection through processing bath Detection of wafers remaining in the cleaning bath Product name Discrete sensors Chemical-resistant fiber-optic sensors HPF-T029 Current Situation Problems are caused by wafers remaining in the processing bath. Chemicals sometimes splash out of the processing bath. Optical fiber is cut according to the distance from the unit to the amplifier. Process and equipment name Front-end processes, batch cleaning system Current Issues Problem 1 Light is insufficient because it comes through the processing bath, because chemical solution is cloudy, etc. Problem 2 Splashed chemicals corrode the fiber jacket, reducing the amount of light. Problem 3 Chemical-resistant fiber-optic sensors are inconvenient because PFA tube and fiber must be cut separately.

Built-in lens for high power HPF-T029 is a high-power model with a built-in lens. High power is equivalent to max. installation distance of 3500 mm (HPX-EG50/51 in HP mode). PFA protection for chemical resistance A highly chemical-resistant PFA tube is used. PFA tubes are time-proven with many different cleaning-system chemicals. Significant reduction in installation work For chemical-resistant transparent fiber, the O.D. of the PFA tube is the same as the diameter of the insertion hole in the amplifier (2.2 mm), so the fiber can be cut while in the PFA tube and inserted as is into the amplifier....