azbil Semiconductors Laser sensors High speed, high accuracy, saves space Helps improve accuracy of wafer eccentricity measurement Product name Discrete sensor High-Accuracy Position Sensors Process and equipment name Single wafer cleaning equipment K1G- Current Issues Current Situation ■ Special cleaning processes require high-accuracy wafer ■ Compact sensors using the light intensity method are not positioning. accurate enough. ■ Noncontact positioning is desirable. ■ With many cleaning chambers, there is not much space for sensors. ■ There is no room for high-accuracy 1D measuring devices or image sensors. ■ With many chambers, sensors that are as inexpensive as possible are needed. Imaging system

Best-in-class accuracy captures high-accuracy wafer eccentricity data Fastest-in-class measurement obtains wafer eccentricity data at many more points Smallest and lightest sensor head in its class can be installed in very small spaces A multichannel controller at a reasonable price Azbil’s unique FDN algorithm and super-resolution technology achieve a resolution of 0.1 µm. Dual-processor multitasking quadruples the processing speed of previous models. Ultrathin sensor head is a mere 20×8×50 mm — install it almost anywhere! Controller can be connected to up to 4 sensor-head channels, cutting...