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Valve stroke detection sensor

Valve stroke detection sensor

Valve stroke detection sensor

Product catalog summary
Product Overview
The document discusses the HPF-T054-L05 model, a flat U-shape fiber unit designed for use in semiconductor manufacturing, specifically in single wafer cleaning systems. It addresses the challenges associated with detecting the stroke of IPA (isopropyl alcohol) valves using non-electric fiber units.

Current Issues
  • IPA valve problems are exacerbated due to the inability to detect issues immediately.
  • Specifications for sensors vary based on the chemical solution used.
  • Through-beam photosensors lack displays and settings, making them unsuitable for IPA environments.
  • The design of the valve stroke detection mechanism is not standardized, complicating error diagnosis.

Solutions
  • Solution 1: The non-electric fiber unit can be used in IPA environments, as it does not contain electrical components that could ignite explosive atmospheres.
  • Solution 2: Installation specifications match those of other manufacturers' through-beam photosensors, eliminating the need for redesign.
  • Solution 3: The combined amplifier unit displays light intensity values, aiding in problem identification and threshold adjustment.

Technical Specifications
  • Model No.: HPF-T054-L05
  • Scanning distance: 5m
  • Minimum detectable size: φ0.005 mm
  • Operating temperature range: -30 to +70°C
  • Housing material: Black PPS with black epoxy resin adhesive

Additional Information
Specifications are subject to change without notice. The document emphasizes the importance of reading explosion protection regulations before using the fiber unit in hazardous environments.
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Catalog excerpts

Valve stroke detection sensor-1

Non-electric fiber unit Fiber switches Fiber switches IPA valve* stroke detection help *A valve used for isopropyl alcohol Product name Discrete sensors Flat U-Shape fiber unit HPF-T054-L05 Current Situation IPA valve problems worsen bec ause they c annot be detected immediately. Specifications for sensors vary depending on chemical solution. Through-beam photosensors do not have a display or settings. Process and equipment name General front-end , single wafer cleaning system Current Issues Problem 1 There are no through-beam photosensors that can be used in an IPA environment. Problem 2 Design of the valve stroke detection mechanism cannot be standardized. Problem 3 The cause of errors is difficult to locate because the state at the time of occurrence cannot be checked.

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Valve stroke detection sensor-2

Non-electric fiber unit can be used in an area with IPA. Photosensors with electrical circuits/components cannot be used in IPA or other explosive atmospheres. This product can be used in explosive atmospheres by installing the fiber unit in the dangerous area and the amplifier unit in a safe area. Before use, carefully read the explosion protection regulations that apply to the facility and equipment where you plan to use the fiber unit. Product installation specifications are the same as those for through-beam photosensors from other manufacturers. Redesign work is not necessary because the...

 Open the catalog to page 2

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