* This combination can be selected only when pressure range (IV) is less than 100 Pa. Note: If a model No. combination that is not listed as possible is needed, please contact the azbil Group. Setting a New Global Standard Peripheral tools (sold separately) Items Please read “Terms and Conditions” from the following URL before ordering and use. https://www.azbil.com/products/factory/order.html V___I_y VCR is a trademark of Swagelok Company. Other product names, model numbers and company names may be trademarks of the respective company. [Notice] Specifications are subject to change without notice. No part of this publication may be reproduced or duplicated without the prior written permission of Azbil Corporation. Export Control & Compliance Products in this Specification (“Products") are subject to laws and regulations of Japan and any other applicable jurisdiction with respect to export of the Products. In order for Azbil Corporation to apply for the appropriate export license in Japan, your cooperation may be asked for the provision of details on end user, end use and any other related information. Further, in case of export from Japan by an exporter (“Exporter”) or reexport from any other countries, you are required to obtain the appropriate export license from the government of Japan or such other countries. In addition, in case of re-export of the Products, any re-exporter is required to obtain the prior consent of the Exporter. Azbil Corporation Advanced Automation Company Yamatake Corporation changed its name to Azbil Corporation on April 1, 2012. 1-12-2 Kawana, Fujisawa Kanagawa 251-8522 Japan URL: https://www.azbil.com

This Sapphire Capacitance Diaphragm Gauge Will Revolutionize Vacuum Processes. 01 Better product quality Vacuum gauges are often used in harsh environments where various factors can cause the zero shift, affecting controllability and thus the quality of the final product. The sapphire capacitance diaphragm gauge is built to keep the zero shift. Sapphire Capacitance Diaphragm Gauge Pressure sensing is in the center, where deposition has the least effect Interior of pressure sensor Sapphire Deposition on the pressure sensor during the film deposition process in Pressure sensor semiconductor manufacturing...

02 Better productivity This gauge reduces equipment downtime, and is equipped with functions to cut wasted time. 03 Better process We help to improve your processes by visualizing various types of information that conventionally could only be inferred from changes in the pressure signal. Faster zero adjustment Monitoring/operation/setting tools Zero adjustment is simple Data that can be displayed Wider zero adjustment range By connecting a dedicated PC loader, it is easy to display the When the sapphire capacitance diaphragm gauge is in The zero adjustment range is a wide ±20 % FS, allowing desired...

I Sample applications Use this gauge in systems like the following. Customer's comment Because the zero does not shift much at all, wafer yield has improved and costs were significantly cut. Customer's comment Test run time was significantly cut using the PC loader. Customer's comment Device has enabled stable control with less zero shift. Customer's comment Now with high-accuracy measurements we are able to do more correct evaluations. *1. At the allowable pressure, the performance level of the gauge can be maintained. *2. At the marginal pressure, the gauge will continue to function. *3: At...