■ Model selection guide Note 1: L/min(standard) indicates the volume flowrate (L/min) per minute converted at 20 , 1 atmosphere (1 atm). The reference temperature can also be changed to 0,25 and 35 . Note 2: The air/nitrogen is set as a factory setting. This controller can also be used for argon and carbon dioxide (CO2) gases by changing the setting of the gas type selection in the function setup. Note 3: Analog input/output function is not applied. ■ Terminal connection • Connector specifications Part No.: MCVM1.5/9-STF-3.5 (Phoenix Contact Mfg.) Wire type: Either of solid wire or stranded wire applicable Compatible cable: 0.08 to 1.5mm2 (AWG#28 to #16) Appropriate length of stripped wire: 7mm Compatible screwdriver: Tip size 2.5 x 0.4mm (flat-head) azbil Panel Mount Mass Flow Controller • Power supply 24Vdc • External switch input -o\)-@ DI1 ^ DI2 -@ SIGNAL GND • RS-485 communication (model with RS-485 communication function) DA ^@ DA • Analog input/output (model with analog input/output function) 0 to 5V or 1 to 5V input 0 to 5V or 1 to 5V output • Event output (Note) Load Load Ob Mass Flow Controller <?U.U son azbil Advanced Flow Control Possible with the Panel Mounting Type Controller ( “ >| Please read the "Terms and Conditions" from the following URL before ordering or use: http://www.azbil.com/products/bi/order.html [Notice] Specifications are subject to change without notice. No part of this publication may be reproduced or duplicated Other product names, model numbers and company names may be trademarks of the respective company. without the prior written permission of Azbil Corporation. •Small and Light mass flow controller Compact (front panel: 48x48mm, depth: 73.7mm) and light (300g) panel mounting body contains a built-in miniature proportioning valve, enabling full-automatized flow control. •Easy operation and easy mounting Easy operation and easy mounting even for the purgemeter users. Once you set the flowrate set point, all the operations are automatically done by the MPC. External set point change (from PLC or host systems) is easy, using optional analog setting input function or communication function (RS-485). •24V DC drive The 24V DC drive for the mass flow controller is already common. Azbil Corporation Advanced Automation Company Yamatake Corporation changed its name to Azbil Corporation on April 1, 2012. 1-12-2 Kawana, Fujisawa Kanagawa 251-8522 Japan URL: http://www.azbil.com •Azbil’s original pF (Micro Flow) sensor High speed (1s), high accuracy (2%FS) flow control unaffected by pressure and temperature fluctuations. •Variety of functions available as a standard Variety of functions responding user demands offers total equipment cost reduction. The MPC meets such user demands as follows: • Numerical flowrate control is required. • The purgemeter problem,“the measurement error caused by conditional difference between equipment design and field”,is required to be solved. • Flowrate control is required, but high cost, complicated instrumentation or difficult operation is unacceptable. • Purgemeters are required to be replaced with mass flow controllers, but drastic design change such as mounting locations or piping layout is impossible. Solution for purgemeter problems: Pressure and temperature compensation is inevitable for the purgemeters. Moreover, the scale reading requires being converted using the formula when conditions in use are different from conditions under design, in gas specific gravity or secondary back pressure. The MPC controls mass flowrate, releasing from such onerous process. 1st Edition : Issued in Mar. 2003-MO 4th Edition : Issued in Nov. 2012-AZ

■ Product Specification List Superior performance with its high-speed control Easy pipe connections and electrical wiring The MPC offers high-speed control similar to that of the favorable CMQ Series. High-speed control during a control start (from zero point onwards) and a set point change. Also, disturbance such as pressure fluctuation is minimized with its high-speed control. Control flowrate I 20L/min 18L/min 16L/min 14L/min 12L/min 10L/min 8L/min 6L/min 4L/min 2L/min Note 1. L/min(standard) indicates the volume flowrate (L/min) per minute converted to 20°C, 1 atmosphere. Note 2. Differential...