Summary of General Specifications Applicable gas *1 Install a filter in upstream side of this device to trap the dust or oil mist of 10pm or larger. *2 When used at 24 Vdc drive, the output change may occur within ±1 %FS max. after flowrate stabilization in the vicinity of measurement range upper limit flowrate (the amount of drift after 500 s from the flowrate stabiliztion). Model MCS100 is a small mass flow sensor with fast response, made possible by a built-in azbil MEMS sensor, millions of units of which have been shipped. With its combination of a thermal MEMS sensor and a flow path with low pressure loss, the MCS100 can measure air flows under 10L/min with a fast 5 ms response. Model lineup ( Absolute maximum flow rate is limited to ±12L/min in all models ) * Please refer to the Specsheet (CP-SS-1833) for detailed product specifications for each model number. Bidirectional Low power Any mounting position flow range consumption is OK Azbil Corporation Advanced Automation Company Yamatake Corporation changed its name to Azbil Corporation on April 1, 2012. 1-12-2 Kawana, Fujisawa Kanagawa 251-8522 Japan URL: https://www.azbil.com Accessories Multi channel indicator model MCW401A100 - A flow indicator optimized for the use with MCS100 - 4 open-collector switch outputs - RS-232C communication with PC or PLC can be used to set parameters or to view instantaneous flow rates and switch status on each channel - 4 types of window comparator mode for pick-up & placement applications, and hysteresis mode suitable for general flow monitoring applications. - Compatible MCS100 models: MCS100A100, MCS100A104, MCS100A108, MCS100A112, MCS100A120, MCS100A128 Please read “Terms and Conditions” from the following URL before ordering and use. https://www.azbil.com/products/factory/order.html V__/ Other product names, model numbers and company names may be trademarks of the respective company. [Notice] Specifications are subject to change without notice. No part of this publication may be reproduced or duplicated without the prior written permission ofAzbil Corporation. Measures mass flow rate Ultra-small, lightweight, install anywhere

Recommended Applications and Benefits Control of suction flow rate in gas detectors, air sampler, etc. Measures mass flow rate of air according to standard conditions (20 °C, 1 atm), without temperature and pressure compensation. Ultra-small and lightweight, easily installed anywhere Control or monitoring of supply flow rate for oxygen concentrators, etc. Bidirectional flow range Monitoring of purge or cooling flow rate for wire bonders, etc. - Measures flow rate of air supplied to eliminate heat haze. - Measures flow rate of nitrogen supplied to prevent oxidation. - Useful for replacing a float...