Network Instrumentation Modules Network Instrumentation Modules Chemical solution temperature control With Network Instrumentation Modules, better throughput & smaller footprint! Product name Network Instrumentation Modules NX-_ _ _ Current Situation Process and equipment name Front-end process, single wafer cleaning equipment Current Issues The chemical solution used for SPM cleaning generates heat when blended, and the temperature takes a long time to stabilize in the chemical solution tank. Temperature is also adjusted in the piping to keep it consistent while the chemical solution is sent from the tank to the cleaning nozzle. To improve throughput, we need to suppress overshoot caused by the heat of reaction in order to reduce the startup time when replacing the chemical solution. Problem 2 Blending unit We have many cleaning chambers and need to minimize the controller footprint and the wiring work, even though the number of temperature control points in the piping and heater wire break monitoring points are increasing. Chemical tank

High-speed settling logic of the Just-FiTTER algorithm Four-channel current transformer input Standard Ethernet support allows for concatenated or distributed layout Azbil’s unique algorithm suppresses overshoot, allowing significantly faster equipment startup. A single module can supply PID control to four loops, and it is equipped with four current transformer inputs. The footprint of this compact module is just half that of the previous module. Concatenated layout using Ethernet reduces communication wiring. Linkage between modules Analog input Analog output Current transformer input Event...