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Liquid level sensors

Liquid level sensors

Liquid level sensors

Product catalog summary
Overview: This document provides a comprehensive overview of a range of sensors designed for reliable liquid level detection in semiconductor wet processes. It includes discrete sensors and pipe-mounted liquid level switches with built-in amplifiers, as well as tank-inserted fiber-optic sensors.
Specifications: The sensors are suitable for batch and single wafer cleaning equipment, and can be used in pipes of various thicknesses. They are designed to detect upper and lower liquid levels using float or electrode sensors.
Current Issues: Challenges include thin pipes that complicate sensor installation, interference from air bubbles and cloudiness, sticking of movable parts, metal contamination, and lack of fail-safe measures.
Solutions:
  • Solution 1: HPQ-T_ _ pipe-mounted liquid level switches support small and ultra-small diameter pipes, ensuring a large difference between received and blocked light levels.
  • Solution 2: Pipe-mounted fiber-optic sensors use 16 optical axes to minimize the effects of air bubbles and water droplets.
  • Solution 3: Tank-inserted fiber-optic sensors with an all-resin structure prevent metal contamination and have no movable parts.
  • Solution 4: Fail-safe measures for fiber breakage detection are implemented using specific models for upper and lower limit detection.
Product Models: The document lists several models, including HPF-T032, HPF-T034, HPF-D027, and HPF-D033, each with specific features for different detection needs.
Additional Information: The document notes that specifications are subject to change and provides a URL for terms and conditions. It also mentions the rebranding of Yamatake Corporation to Azbil Corporation.
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Catalog excerpts

Liquid level sensors-1

azbil Semiconductors Wet process A full lineup that reliably liquid levels Application-specific sensors Discrete sensors Product name Pipe-mounted liquid level switches with built-in amplifier / Pipe-mounted / tank-inserted fiber-optic liquid level sensors Process and equipment name Batch, single wafer cleaning equipment Current Issues Current Situation ■ Pipes of various thicknesses in the discharge section. ■ Pipes are too thin for sensor installation. ■ Various liquid states inside the pipes. ■ Air bubbles and cloudiness interfere with reliable detection. ■ Float or electrode sensors are used. ■ Sticking of movable parts and metal contamination. ■ Sensors are used for upper/lower limit detection. ■ No fail-safe measures.

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Liquid level sensors-2

Small diameters of 1/16 inch and 3–7 mm are supported. Pipe-mounted fiber-optic liquid level sensors use 16 optical axes to reduce the effects of air bubbles and water droplets Tank-inserted fiber-optic sensors have no movable parts, and their all-resin structure does not cause metal contamination Lineup of pipe-mounted fiber-optic liquid level sensors with fail-safe protection Model HPQ-T_ _ pipe-mounted liquid level switches with built-in amplifier are available for small (3–7 mm) and ultra-small (1/16") diameter pipes, in addition to standard diameters (φ8–φ 13). The pipe-mounted fiber-optic...

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