azbil Semiconductors Wet process A full lineup of sensors that reliably detect liquid leaks Discrete sensors Product name Liquid-leak switch with built-in amplifier/ Liquid-leak detection fiber-optic sensor Process and equipment name Batch, single wafer cleaning equipment Current Issues Current Situation ■ Using sensing bands to detect leaks ■ Installation in a low location ■ Various types of liquids ■ Dense wiring ■ Error recovery and maintenance are too slow. ■ Selecting the right model for the chemical/solvent takes time. ■ Can’t detect leaks under equipment: sensor doesn’t fit or cable direction is wrong. ■ Wires get pulled, leaving the sensor in the wrong place or hanging in the air. Conventional products cannot be put under equipment. BU No.: DIS-03-001

Maintenance of optical sensors is quick and easy After leak detection, simply wipe off the detecting surface to restart the sensor. With optical sensors, the conductivity of the liquid does not matter. Products designed for a variety of chemicals and environments PP, PVC, and PFA models with built-in amplifier are available. A PFA fiber-optic model whose detector does not conduct electricity is available. Thin structure allows for installation in tight spaces Models HPQ-D1_ and HPQ-D2_ are just 10.5 mm thick. The cable comes from the side of the sensor, and mounting is also from the side. Locking...