High reliable resistance vacuum measurement
2Pages

Add to favorites

{{requestButtons}}

Catalog excerpts

Highly reliable — resistance to deposits and corrosion Vacuum gauges Vacuum gauges Higher quality by stabilizing production processes Product name Model No. Process sensor Sapphire Capacitance Diaphragm Gauge Process and equipment name Vacuum equipment Current Situation Current Issues Daily adjustment due to zero shift of vacuum gauges. Frequent zero adjustment is troublesome. Adjustment of vacuum as film is deposited. Accuracy drift due to deposits on pressure sensors. Cleaning of chamber with corrosive gas. Damaged pressure sensors due to corrosive gas. High-accuracy measurement of degree of vacuum. Uncertainty about traceability at outside agencies.

Open the catalog to page 1

With a sapphire pressure-sensing diaphragm, zero shift in repeated processes is suppressed Sapphire pressure-sensing diaphragms are less affected by mechanical stress than metal ones. Azbil's proprietary baffle structure reduces deposits on the pressure sensor as film forms The baffle and pressure sensor were specifically designed to reduce deposits on the pressure and avoid accuracy drift. With highly corrosion-resistant sapphire, effects from corrosive gas are “under control” Sapphire sensing elements are highly resistant to the cleaning gas used to remove deposits. Azbil provides JCSS...

Open the catalog to page 2

All Azbil Europe NV catalogs and technical brochures

1. 

   V8C/V8S

   4 Pages

2. 

   Single Loop Controller Model C1M

   2 Pages

3. 

   F4Q

   6 Pages

4. 

   F7M

   4 Pages

5. 

   Application overview for wafer cleaning

   2 Pages

6. 

   N2 flow control for chemical nozzle

   2 Pages

7. 

   Chemical liquid amount monitor

   2 Pages

8. 

   Valve stroke detection sensor

   2 Pages

9. 

   Air purge control

   2 Pages

10. 

    Liquid temperature control

    2 Pages

11. 

    Wafer detection sensor

    2 Pages

12. 

    Wafer alignment sensor

    2 Pages

13. 

    Liquid level sensors

    2 Pages

14. 

    Liquid leakage sensors

    2 Pages

15. 

    Micro Flow Rate Liquid Flow Meter Model F7M

    2 Pages

16. 

    Adjustable Proximity Sensor H3C

    6 Pages

17. 

    Paperless Recorder ARF

    7 Pages

18. 

    Fiber Unit Selection Guide HPF

    26 Pages

19. 

    Digtal Fiber-Optic Switches HPX-EG

    6 Pages

20. 

    Panel Mount Mass Flow Controller MPC

    2 Pages

21. 

    Compact Digital Mass Flow Controller F4H

    12 Pages

22. 

    Gas Mass Flowmeter CMS

    4 Pages

23. 

    Air Flow Meter MCF

    8 Pages

24. 

    Sapphire Capacitance Vacuum manometer SPG

    4 Pages

25. 

    Multi-Loop PID Controller with Multifunction Display C7G

    10 Pages

26. 

    WET process sensors

    16 Pages

27. 

    Distance-Adjustable Photoelectric Swich HP7-G

    6 Pages

28. 

    General-Purpose Self-Contained Photoelectric Switcheds HP7

    10 Pages

29. 

    Photoelectric Switches for Harsh Environments H2B

    4 Pages

30. 

    Network Instrumentation Module

    8 Pages

31. 

    AT9000

    2 Pages

32. 

    Mass Flow Sensor Model MCS100

    2 Pages

33. 

    Advanced Transmiter Model GTX

    7 Pages

34. 

    Digital Mass Flow Controller

    6 Pages

35. 

    High-Accuracy Position Sensors

    16 Pages

36. 

    HP series

    16 Pages

37. 

    Capacitance Diaphragm Gauge

    4 Pages

38. 

    Meets Global Standards

    12 Pages

39. 

    AX Series Vortex Meters

    12 Pages

40. 

    GasCVD

    2 Pages

41. 

    MagneW 3000 PLUS+

    2 Pages

42. 

    Multi Loop Controller with Multi-input Computation Function SDC45V/46V

    2 Pages

43. 

    Multi Loop Controller SDC45A/46A

    4 Pages

44. 

    Single Loop Controller SDC25/26

    2 Pages

45. 

    MagneW NeoPLUS

    2 Pages

46. 

    Single Loop Controller SDC15

    2 Pages

47. 

    Azbil Group introduction

    8 Pages