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Digital Mass Flow Controller
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Catalog excerpts

Digital Mass Flow Controller - 1

Warnings and Cautions for MQV series Flow Controllers (For installation and use of this device, refer to the warnings and cautions in the user's manual.) • Never allow gases that are within explosive limits to pass through this device. Doing so might result in an explosion accidents. • Never use a device for oxygen gas if it is not a special oil-free oxygen gas model. Doing so could cause the gas to ignite. Even if gas-contacting sections have been treated to be oil-free, they cannot be used for oxygen if they have previously been used for some other gas. • If the device is used for burner air-fuel ratio control, take the necessary countermeasures with the equipment to prevent the occurrence of backfire and to avoid any influence to the device even if backfire occurs. Pressure increase or fire in the pipes caused by the backfire of the burner could damage the controller. • Prevent foreign matter from entering the device. If rust, water droplet, oil mist, or dust in the pipes enters the device, measurement or control error or damage might occur. If there is a possibility of foreign matter entering the device, provide a filter, strainer or mist trap capable of eliminating foreign matter 0.1 Arm or greater in diameter at the upstream. Be sure to inspect and replace the filter at regular intervals. • Use the device within the operating differential pressure range. Also, do not subject it to pressure beyond the rated pressure resistance range. Doing so might damage it. • Do not subject this device to pressure beyond its rated pressure resistance. Doing so might result in damage. • Be sure to use within the flow rate range stated in the product specifications. To prevent excessive flow rate, design instrumentation that includes, as appropriate, supply pressure management, a throttle valve, etc. Exceeding the upper limit of the range may result in display and output values that are considerably lower than the actual flow rate. • If a problem with this device could result in damage, include appropriate redundancy in the system design. • The valve on this device cannot completely shut a flow off. If complete shutoff is required, provide a shutoff valve separately. When the external valve is closed, it is necessary also to fully close the valve of the device using either of the following methods: • Set the flow rate setpoint to zero. • Make the valve operation mode to fully closed. If this valve remains in normal control status when the external shutoff valve is closed (zero flow rate), there will be an excessively large flow as soon as the external shutoff valve is opened. For the MQV0050(J/K), MQV0200(J/K). and MQV0500(J/K), if the external shutoff valve is closed continuously for 5 minutes or more in control mode or with the valve forced fully open, the valve overheating limit (AL71) will be activated and the current to the valve will be forcibly limited. • Before connecting pipes with Swagelok or VCR connections, check the precautions in the instruction provided by the connecting joint manufacturer. When separately purchasing a connecting joint, use the following made by Swagelok Co., Ltd: 1/4” Swagelok: SS-400-1-6ST (standard) SS-400-1-6STSC11 (oil-inhibited) 1/2” Swagelok: SS-810-1-8ST (standard) SS-810-1-8STSC11 (oil-inhibited) 1/4” VCR: SS-4-VCR-1-00032SC11 3/8” VCR: SS-8-VCR-1-8STSC11 or equivalent • Observe the following when using the device (oil-free model) for oxygen gas: • Piping should be carried out by a specialist skilled in handling oxygen gas. • Use oil-free pipes and parts. • Be sure to remove foreign matter, burrs, etc. from the pipes before connecting the device. • Install a filter upstream of the device. • Mount securely in order to prevent vibration. Otherwise, equipment failure could result. • Mount the device horizontally. Do not mount it with the display facing down. Doing so might cause measurement error or equipment failure. • For the MQV0050(J,K)/0200(J,K)/0500(J,K)/1000(J,K), to keep pressure loss in the piping as low as possible, use as large a diameter pipe as possible. If the pressure loss in the piping is high, the gas supply pressure to this device (operating differential pressure) may fluctuate greatly, resulting in unstable control. • When using a relay for external contact input and/or external 3-way switching input, always use a relay designed for micro-current use (with gold contacts). Failure to do so could cause faulty contact, resulting in malfunction. • If there is a risk of a power surge caused by lightning, use Azbil Corporation's SurgeNon to prevent possible fire or equipment failure. • Gas type switching by external contact input, flow rate switching, and analog input/output voltage range switching by external 3-way input switching should be done only after setting the operation mode to fully closed. Switching while controlling could cause large fluctuations. • Do not use a semi-standard gas model with gases other than those below. Doing so may degrade the O-ring seal. •Compatible gases: Nitrogen (N2), air, argon (Ar), carbon dioxide (CO2), ammonia (NH3), and acetylene (C2H2). • If a semi-standard gas model is used for a gas with an ammonia component, be sure the gas is dry, with a dew point of -20”C or less. Otherwise the sensor may be damaged. Digital Mass Flow Controller New advances in finely honed control capability! Superior high-speed control (300ms) with an enhanced variety of functions. f \ Please read the "Terms and Conditions" from the following URL before ordering or use: http://www.azbil.com/products/bi/order.html [Notice] Specifications are subject to change without notice. No part of this publication may be reproduced or duplicated Other product names, model numbers and company names may be trademarks of the respective company. wihout the prior written permission of Azbil Corporation. Azbil Corporation Advanced Automation Company Yamatake Corporation changed its name to Azbil Corporation on April 1, 2012. 1-12-2 Kawana, Fujisawa Kanagawa 251-8522 Japan URL: http://www.azbil.com 1st Edition : Issued in Mar. 2006-ST 7th Edition : Issued in Nov. 2014-SK/AZ

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