Liquid flow rate measurement Liquid flow rate measurement Chemical flow rate measurement Micro Flow Rate Liquid Flow Meter suitable for measuring chemicals for low-concentration cleaning fluids Product name Process sensor Micro Flow Rate Liquid Flow Meter Process and equipment name Current Situation Front-end process, single wafer cleaning equipment Current Issues Since the concentration of chemicals in cleaning fluids is lower than it used to be, micro flow rates must now be measured. Many cleaning fluids tend to have air bubbles. (Hydrogen peroxide bubbles prevent measurement with high repeatability.) No flowmeter can measure micro flow rates of several mL/min with high repeatability. Ultrasonic flowmeters are affected by air bubbles, so their measurements are not reliable. There are no micro flowmeters that are easy to install. Conventional flowmeters are difficult to install, partly because the detector and converter are separate. General ultrasonic flowmeter Blending unit Separate units Installation is difficult Chemical tank Air bubbles cause problems Chemical solution

Formerly difficult measurement of micro flow rates of several mL/min is now possible. Flowmeter uses a thermal principle and Azbil’s proven MEMS sensing technology. Use of a measurement method that is less affected by air bubbles. Compact, light-weight, and easy to install Azbil’s thermal flowmeter is less affected by air bubbles than ultrasonic flowmeters, enabling reliable measurement. Its straight flow path allows air bubbles to escape. This flowmeter is more compact and lighter than its predecessors, has an IP65 enclosure rating, and can be installed anywhere. Because the exterior has no...