Application overview for wafer cleaning
2Pages

Add to favorites

{{requestButtons}}

Catalog excerpts

azbil Equipment and Application Overview Please read “Terms and Conditions” from the following URL before ordering and use. https://www.azbil.com/products/factory/order.html Other product names, model numbers and company names may be trademarks of the respective company. Azbil Corporation Advanced Automation Company 1-12-2 Kawana, Fujisawa Kanagawa 251-8522 Japan URL: https://www.azbil.com Wafer Cleaning Equipment [Notice] Specifications are subject to change without notice. No part of this publication may be reproduced or duplicated without the prior written permission of Azbil Corporation. Azbil Corporation

Open the catalog to page 1

For the challenges confronting the semiconductor industry —higher quality, higher productivity, preventive maintenance— we provide a wide variety of solutions. Applicable industry Manufacturing process Semiconductor Front-end processes Wafer cleaning equipment Typica| Equipment description: Removes impurities such as organic substances and equipment metals from the wafer surface using solvents and chemicals. There is batch equipment (immerses multiple wafers in the processing layer) and single-wafer equipment. FOUP nitrogen purge flow control Chemical flow rate measurement Stroke detection...

Open the catalog to page 2

All Azbil Europe NV catalogs and technical brochures

1. 

   V8C/V8S

   4 Pages

2. 

   Single Loop Controller Model C1M

   2 Pages

3. 

   F4Q

   6 Pages

4. 

   F7M

   4 Pages

5. 

   High reliable resistance vacuum measurement

   2 Pages

6. 

   N2 flow control for chemical nozzle

   2 Pages

7. 

   Chemical liquid amount monitor

   2 Pages

8. 

   Valve stroke detection sensor

   2 Pages

9. 

   Air purge control

   2 Pages

10. 

    Liquid temperature control

    2 Pages

11. 

    Wafer detection sensor

    2 Pages

12. 

    Wafer alignment sensor

    2 Pages

13. 

    Liquid level sensors

    2 Pages

14. 

    Liquid leakage sensors

    2 Pages

15. 

    Micro Flow Rate Liquid Flow Meter Model F7M

    2 Pages

16. 

    Adjustable Proximity Sensor H3C

    6 Pages

17. 

    Paperless Recorder ARF

    7 Pages

18. 

    Fiber Unit Selection Guide HPF

    26 Pages

19. 

    Digtal Fiber-Optic Switches HPX-EG

    6 Pages

20. 

    Panel Mount Mass Flow Controller MPC

    2 Pages

21. 

    Compact Digital Mass Flow Controller F4H

    12 Pages

22. 

    Gas Mass Flowmeter CMS

    4 Pages

23. 

    Air Flow Meter MCF

    8 Pages

24. 

    Sapphire Capacitance Vacuum manometer SPG

    4 Pages

25. 

    Multi-Loop PID Controller with Multifunction Display C7G

    10 Pages

26. 

    WET process sensors

    16 Pages

27. 

    Distance-Adjustable Photoelectric Swich HP7-G

    6 Pages

28. 

    General-Purpose Self-Contained Photoelectric Switcheds HP7

    10 Pages

29. 

    Photoelectric Switches for Harsh Environments H2B

    4 Pages

30. 

    Network Instrumentation Module

    8 Pages

31. 

    AT9000

    2 Pages

32. 

    Mass Flow Sensor Model MCS100

    2 Pages

33. 

    Advanced Transmiter Model GTX

    7 Pages

34. 

    Digital Mass Flow Controller

    6 Pages

35. 

    High-Accuracy Position Sensors

    16 Pages

36. 

    HP series

    16 Pages

37. 

    Capacitance Diaphragm Gauge

    4 Pages

38. 

    Meets Global Standards

    12 Pages

39. 

    AX Series Vortex Meters

    12 Pages

40. 

    GasCVD

    2 Pages

41. 

    MagneW 3000 PLUS+

    2 Pages

42. 

    Multi Loop Controller with Multi-input Computation Function SDC45V/46V

    2 Pages

43. 

    Multi Loop Controller SDC45A/46A

    4 Pages

44. 

    Single Loop Controller SDC25/26

    2 Pages

45. 

    MagneW NeoPLUS

    2 Pages

46. 

    Single Loop Controller SDC15

    2 Pages

47. 

    Azbil Group introduction

    8 Pages