azbil Equipment and Application Overview Please read “Terms and Conditions” from the following URL before ordering and use. https://www.azbil.com/products/factory/order.html Other product names, model numbers and company names may be trademarks of the respective company. Azbil Corporation Advanced Automation Company 1-12-2 Kawana, Fujisawa Kanagawa 251-8522 Japan URL: https://www.azbil.com Wafer Cleaning Equipment [Notice] Specifications are subject to change without notice. No part of this publication may be reproduced or duplicated without the prior written permission of Azbil Corporation. Azbil Corporation

For the challenges confronting the semiconductor industry —higher quality, higher productivity, preventive maintenance— we provide a wide variety of solutions. Applicable industry Manufacturing process Semiconductor Front-end processes Wafer cleaning equipment Typica| Equipment description: Removes impurities such as organic substances and equipment metals from the wafer surface using solvents and chemicals. There is batch equipment (immerses multiple wafers in the processing layer) and single-wafer equipment. FOUP nitrogen purge flow control Chemical flow rate measurement Stroke detection for...